Probe Card Alignment via Group Gradient Calculation
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Solution Overview
Problem
Existing techniques for aligning electrode pads and probes lack high accuracy, leading to potential misalignment during inspection processes.
Innovation Solution
An alignment method for a probe card that calculates the gradient and center of probe groups for each chip, and subsequently for the entire probe card, using position information from multiple probes to achieve precise alignment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional alignment techniques are used to adjust probe card gradient, then alignment can be performed, but alignment accuracy is insufficient
Solution Approach 1:
The alignment process is segmented into two distinct modes: a first mode that calculates gradient and center for each individual probe group, and a second mode that calculates gradient and center for the entire probe card. This segmentation allows for localized precision adjustments while maintaining overall alignment accuracy, resolving the contradiction between measurement precision and manufacturing precision.
Solution Approach 2:
The method performs preliminary calculations of gradient and center positions for each probe group before conducting the actual alignment. By pre-calculating these parameters and storing them for later use, the system ensures high alignment accuracy without requiring complex real-time adjustments during the inspection process.
2Reliability
If alignment is performed without considering chip misalignment, then process is simple, but alignment reliability deteriorates
Solution Approach 1:
The alignment system is divided into probe group units, each with independently calculated gradient and center values. This segmentation allows the system to handle chip misalignment on a localized basis without requiring complete redesign of the alignment process, thereby improving reliability while controlling complexity.
Solution Approach 2:
The method changes the alignment parameters by calculating and utilizing gradient and center positions for each probe group rather than using a single global alignment parameter. This parameter change enables the system to adapt to chip misalignment variations, improving alignment reliability without significantly increasing process complexity.
Data Source
AI summary
An alignment method of a probe card includes a plurality of probe groups provided corresponding to a plurality of chips, comprising: a first mode for calculating a gradient and a center of a probe group based on position information of two or more probes included in the probe group for each of the plurality of chips and calculating a gradient and a center of the probe card based on the calculated gradients and the calculated centers of the plurality of probe groups.