Probe Card Analyzer Adapter for Wear-Free Inspection

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Solution Overview

Problem

Existing probe card inspection systems require expensive probe card interfaces and apply high forces, leading to unnecessary wear and reduced lifespan of probe cards and their probes, necessitating a more cost-effective and stress-minimizing assessment method.

Innovation Solution

A probe card analyzer without a probe card interface, using a support plate and sensor head with an adapter to removably couple the probe card, allowing mechanical measurements and alignment assessments without electrical contact, utilizing a cam assembly and objective focus flexure to minimize deflection and force.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a probe card interface is used for electrical contact and measurement, then electrical testing capability is improved, but cost and device complexity increase significantly

Engineering Contradiction:

Improveelectrical testing capabilityVSAvoidprobe card interface requirement

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The patent extracts the electrical testing function from the mechanical measurement system by using a separate, simple adapter that provides electrical contact only when needed. The adapter is removably coupled to the support plate, allowing electrical testing to be performed independently without requiring a complex integrated probe card interface.

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

The patent introduces an adapter as an intermediary component between the support plate and probe card. This adapter provides electrical contact capability when needed while maintaining the simplicity of the mechanical measurement system. The adapter acts as a mediator that adds electrical functionality without complicating the primary mechanical measurement function.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Measurement precision

If high force is applied to overtravel probes into contact with the check plate, then Z height measurement is achieved, but wear on probes and probe card increases

Engineering Contradiction:

ImproveZ height measurementVSAvoidprobe card lifespan

Core Design Contradiction:

Measurement precisionVSDuration of action of stationary object

Solution Approach 1:

The patent applies partial action by using a cam assembly that provides just enough force to achieve probe contact with the check plate for measurement, rather than excessive force. The cam mechanism controls the overtravel distance precisely, applying force only to the extent necessary for accurate Z height measurement while minimizing unnecessary wear.

Inventive Principle:

Principle #16Partial or excessive action

Solution Approach 2:

The patent uses a flexure mechanism as a cushioning element that absorbs and distributes the forces during probe contact. The flexure provides a compliant interface that reduces peak forces and prevents harsh impacts, thereby protecting the probes and probe card from excessive wear while still enabling accurate measurements.

Inventive Principle:

Principle #11Beforehand cushioning (Prior cushioning)

3Measurement precision

If probes are touched down for optical alignment measurement, then alignment accuracy is achieved, but unnecessary wear is inflicted on probes and probe card

Engineering Contradiction:

Improvealignment measurement accuracyVSAvoidwear on probes and probe card

Core Design Contradiction:

Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The patent replaces the mechanical touch-down method with an optical measurement system. The sensor head captures images of the probes and fiducial marks, and software algorithms calculate alignment based on these images. This substitution eliminates the need for physical contact during alignment measurement, thereby preventing wear while maintaining measurement accuracy.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

4Adaptability or versatility

If multiple probe card analyzers are used for different probe card configurations, then versatility is improved, but cost increases due to multiple expensive probe card interfaces

Engineering Contradiction:

Improveprobe card configuration compatibilityVSAvoidnumber of expensive interfaces required

Core Design Contradiction:

Adaptability or versatilityVSQuantity of substance

Solution Approach 1:

The patent creates a universal support plate and adapter system that can accommodate different probe card configurations. The support plate provides a standardized mechanical interface, while removable adapters can be exchanged to match different electrical connection requirements. This multi-functional approach allows a single analyzer to handle various probe card types without requiring multiple specialized interfaces.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Data Source

PatentUS9684052B2Method of measuring and assessing a probe card with an inspection device

Publication Date: 2017.06.20 ONTO INNOVATION INC

AI summary

A method of assessing functionality of a probe card includes providing a probe card analyzer without a probe card interface, removably coupling a probe card having probes to a support plate of the probe card analyzer, aligning a sensor head of the probe card analyzer with the probe card, and measuring a component of the probes with the sensor head.