Probe Card Case Handling Mechanism for Compact Semiconductor Testing

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Solution Overview

Problem

The existing probe cards used in semiconductor device manufacturing are large and heavy, making them difficult to handle, and reducing their size to improve handling poses challenges in manufacturing costs and structural integrity.

Innovation Solution

A probe card case comprising a first case member for mounting the probe card, a second case member with a card fixing mechanism, and transfer handles, allowing the probe card to be fixed and transferred within the case, reducing the need for manual handling and maintaining visibility through transparent components.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If the probe card is enlarged in diameter to provide a handle or structural member for handling, then the ease of operation is improved, but the weight and manufacturing cost increase

Engineering Contradiction:

Improveease of handlingVSAvoidweight

Core Design Contradiction:

Ease of operationVSWeight of moving object

Solution Approach 1:

A case is introduced as an intermediary object to hold and protect the probe card. The case provides the handling function through its external structure while the probe card itself remains compact. The case acts as a mediator between the operator and the probe card, enabling easy handling without modifying the probe card's size.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The system is divided into two independent parts: the probe card and the case. The probe card maintains its small, compact size for cost-effectiveness, while the case provides the handling functionality. This segmentation allows each component to be optimized independently for its specific function.

Inventive Principle:

Principle #1Segmentation

2Ease of operation

If the probe card is enlarged in diameter to provide a handle or structural member for handling, then the ease of operation is improved, but the manufacturing cost increases

Engineering Contradiction:

Improveease of handlingVSAvoidmanufacturing cost

Core Design Contradiction:

Ease of operationVSEase of manufacture

Solution Approach 1:

The case serves as an intermediary that provides handling functionality without requiring modifications to the probe card. This allows the probe card to be manufactured at its minimum necessary size, reducing material costs and manufacturing complexity while the case handles the operational requirements.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

By separating the handling function (case) from the probing function (probe card), each component can be manufactured independently at optimal costs. The probe card can be produced using standard, cost-effective processes for small components, while the case can be manufactured separately with handling features integrated into its design.

Inventive Principle:

Principle #1Segmentation

3Weight of moving object

If the probe card is reduced in diameter to reduce weight and cost, then the manufacturing cost and weight are reduced, but the ease of handling becomes difficult

Engineering Contradiction:

ImproveweightVSAvoidease of handling

Core Design Contradiction:

Weight of moving objectVSEase of operation

Solution Approach 1:

The case acts as a mediator that compensates for the reduced size of the probe card. It provides the necessary handling surface and structural support that would otherwise be required in the probe card itself, enabling easy handling of compact, lightweight probe cards.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The functionality is segmented between the probe card (probing function) and the case (handling function). This allows the probe card to be minimized in size for reduced weight and cost, while the case assumes the handling role.

Inventive Principle:

Principle #1Segmentation

4Ease of operation

If structural members are disposed to secure a large region outside the probe arrangement area, then the ease of operation is improved, but the probe card diameter increases

Engineering Contradiction:

Improveease of handlingVSAvoiddiameter

Core Design Contradiction:

Ease of operationVSLength of stationary object

Solution Approach 1:

The case serves as an intermediary that provides the structural framework and handling surfaces outside the probe arrangement area. The probe card itself can be compact with probes closely arranged, while the case extends outward to provide ergonomic handling features without increasing the probe card's diameter.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The structural members and handling features are segmented into the case rather than being integrated into the probe card. This allows the probe card to maintain a small diameter for close probe spacing, while the case provides the necessary structural extension for handling.

Inventive Principle:

Principle #1Segmentation

Data Source

PatentUS10908180B2Probe card case and probe card transfer method

Publication Date: 2021.02.02 NIHON DENSHIZAIRYO

AI summary

Disclosed is a probe card ease for accommodating a probe card. The probe card case includes: a first case member configured to mount the probe card at a predetermined position therein; a second case member configured to be fitted to a top side of the first case member, and including a card fixing mechanism for fixing the probe card; and a case fixing mechanism configured to fix the first case member and the second case member. The probe card is capable of being transferred in a state where the probe card is accommodated in the probe card case and the first case member and the second case member are fixed, and the probe card is capable of being transferred only with the second case member in a state where the probe card is fixed to the second case member.