Probe Card Detection Circuits for Defective Power Channel Inspection
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Solution Overview
Problem
Existing semiconductor device testing methods face challenges in inspecting electrical connections and power signals without additional devices, particularly in determining defects in power channels and connections between probe cards and testers.
Innovation Solution
A test device and method that includes a probe card with integrated detection circuits to identify defective power channels and connections, using relays and resistors to measure current flow and determine defects in power and test channels, allowing for efficient inspection of semiconductor devices.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If separate devices are used to inspect power signals and electrical connections, then measurement precision is improved, but device complexity increases
Solution Approach 1:
The patent integrates detection circuits directly into the probe card structure, combining the functions of signal transmission and defect detection into a single component. The detection circuits include test channels coupled to power channels, allowing simultaneous inspection of power signals and electrical connections without requiring separate external testing equipment, thus reducing system complexity while maintaining measurement precision
2Reliability
If comprehensive electrical connection inspection is performed before semiconductor device testing, then reliability is improved, but testing time increases
Solution Approach 1:
The patent performs electrical connection inspection and power channel defect detection before attaching the semiconductor device to the probe card. The detection circuits are configured to identify defective power channels and connector issues in advance, allowing operators to replace or repair the probe card assembly before actual device testing begins, thereby ensuring reliability while minimizing time loss by preventing rework
Solution Approach 2:
The detection circuits serve as intermediary elements between the tester and the semiconductor device, enabling preliminary inspection of power channels and electrical connections. These circuits act as a buffer that can identify defects without requiring the semiconductor device itself, allowing fast preliminary checks before committing to full device testing
3Measurement precision
If multiple separate testing devices are used, then measurement precision is improved, but productivity decreases
Solution Approach 1:
The patent combines multiple testing functions into a single integrated probe card assembly. The detection circuits are built into the probe card, allowing simultaneous detection of connector defects, power channel defects, and electrical connection issues in one operation. This eliminates the need for multiple separate testing devices and sequential testing steps, thereby maintaining measurement precision while significantly improving productivity through streamlined testing operations
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables rapid identification of defects in power channels and connections, reducing testing time and costs by integrating detection circuits within the probe card, ensuring reliable electrical connections and efficient semiconductor device inspection.
Implementation Method 1
the detection circuit is configured to measure a current value, and the detection circuit includes a relay and a resistor
Data Source
AI summary
A test device includes a tester configured to provide a plurality of electrical signals to a device under test (DUT), and a probe card removably attached to the tester, the probe card including a plurality of channels and at least one detection circuit, where each of the plurality of channels includes a path through which a respective electrical signal of the plurality of electrical signals moves from the tester to the DUT, the at least one detection circuit is connected to one of the plurality of channels, and the at least one detection circuit is configured to determine whether the connected channel is defective.