Probe Card Direct Contact Terminals Reduce Inductance
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Solution Overview
Problem
Conventional probe apparatuses for evaluating dynamic characteristics of power devices face challenges in accurately measuring current variations due to increased inductance in cables, leading to inaccurate results and potential device damage, and also struggle with high resistance and heat resistance issues in measurement lines, making it difficult to replace probe cards automatically.
Innovation Solution
The design incorporates block-shaped connecting terminals and contact plates that directly contact the tester, reducing resistance and inductance, and using plate spring members with stripe-shaped portions to ensure reliable and stable electrical connections, allowing for easy automatic replacement of the probe card.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Length of stationary object
If a long cable is used to connect the collector electrode film and the tester, then the connection length is increased, but the inductance of the cable increases, causing inaccurate measurement of current variation
Solution Approach 1:
The patent extracts and removes the long cable from the measurement system by implementing direct contact between the probe card and the tester. The probe card is equipped with contact terminals that directly connect to the tester without intermediate cables, thereby eliminating the harmful inductance while maintaining the necessary connection functionality.
Solution Approach 2:
The probe card serves as an intermediary component between the semiconductor wafer and the tester. It provides contact terminals that directly interface with the tester, replacing the cable-mediated connection and enabling accurate measurement by eliminating the cable's inductive effect while still facilitating electrical connection.
2Reliability
If conventional measurement lines are used in the probe card, then the connection is established, but the resistance and heat resistance are high, making it difficult to replace the probe card automatically
Solution Approach 1:
The probe card is designed with movable and replaceable contact terminals that can dynamically connect and disconnect from the tester. This dynamic design enables automatic replacement of the probe card while maintaining reliable electrical connections during measurement, resolving the conflict between connection reliability and replacement automation.
3Reliability
If a cable connection is used between the mounting table and the tester, then the connection is established, but the inductance increases, causing deviation from ideal current variation measurement
Solution Approach 1:
The harmful cable component is extracted and removed from the measurement path. The probe card's contact terminals establish direct electrical connection with the tester, eliminating the cable's inductance while maintaining connection stability, thereby enabling accurate dynamic characteristic evaluation.
Solution Approach 2:
The electrical parameters of the connection path are changed by removing the cable with high inductance and replacing it with direct contact terminals having minimal inductance. This parameter change (from high inductance cable to low inductance direct contact) enables accurate measurement of current variation while maintaining connection reliability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration significantly reduces resistance and inductance in measurement lines, enabling accurate evaluation of power device dynamic characteristics while minimizing heat generation and facilitating easy automatic replacement of the probe card, thereby enhancing reliability and practicality.
Implementation Method 1
a plate spring member whose central portion is protruded is provided on a surface of each of the first connecting terminal 12, the second connecting terminal 14 and third connecting terminal 16
Data Source
AI summary
A probe card 10 includes a first probe 11 configured to come into electric contact with an emitter electrode of a power device D; a block-shaped first connecting terminal 12 to which the first probe 11 is connected; a second probe 13 configured to come into electric contact with a gate electrode of the power device D; a block-shaped second connecting terminal 14 to which the second probe 13 is connected; a contact plate 15 configured to come into electric contact with a collector electrode of the power device D; and a block-shaped third connecting terminal 16 fixed to the contact plate 15. Further, the first connecting terminal 12, the second connecting terminal 14 and the third connecting terminal 16 electrically come into direct contact with corresponding connection terminals of a tester, respectively.