Probe Card Contact Force Detection for Unbalance Correction
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Solution Overview
Problem
Existing probe cards and methods for detecting their conditions are not entirely satisfactory in terms of efficiency and accuracy, particularly in identifying and addressing probe card unbalance issues.
Innovation Solution
A probe card apparatus and method utilizing a pressure film sensor and distance detector on a movable stage to simultaneously measure contact forces across multiple needles, with an adjustment driver to correct any unbalance, ensuring precise alignment and force distribution.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If traditional probe card detection methods are used, then the detection process is simple, but the detection accuracy and ability to identify unbalance issues is insufficient
Solution Approach 1:
The probe card is divided into multiple detection regions corresponding to different needle groups. The detection system segments the measurement process by independently measuring contact forces on each needle group, enabling precise identification of unbalance issues in specific regions rather than treating the entire probe card as a single unit.
Solution Approach 2:
A force sensor is introduced as an intermediary device between the probe card and the measurement system. This sensor indirectly measures the contact forces exerted by each needle group on the probe card, converting mechanical forces into measurable signals without requiring direct contact or complex instrumentation on the probe card itself.
2Reliability
If comprehensive probe card detection is performed to ensure optimal performance, then the reliability is improved, but the production process is disrupted
Solution Approach 1:
The detection of probe card unbalance is performed in advance before the probe card is installed in the production line. By conducting measurements on the probe card while it is still accessible and stationary, the system identifies potential issues early, allowing for corrective actions to be taken without interrupting ongoing production processes.
Solution Approach 2:
The probe card itself serves as part of the detection system by providing the structural framework and needle arrangements that enable self-measurement. The existing mechanical structure of the probe card is utilized to apply and measure forces, eliminating the need for separate, complex testing equipment that would require production shutdowns.
3Productivity
If contact force measurement is performed on multiple needles simultaneously, then the detection speed is improved, but the measurement precision may be compromised
Solution Approach 1:
The simultaneous measurement of multiple needles is achieved by segmenting the probe card into distinct measurement zones, each corresponding to a specific needle group. The force sensor sequentially or independently measures contact forces in each zone, allowing parallel processing of multiple measurement points while maintaining the precision of individual force measurements through dedicated measurement channels.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Facilitates rapid and accurate detection of probe card unbalance, allowing for timely adjustments to ensure optimal performance without disrupting production processes.
Implementation Method 1
detecting the contact force of the probe card
Data Source
AI summary
A method for detecting a contact force of a probe card is provided. The method includes supporting a substrate of the probe card using a support in contact with the substrate via a connector. The method includes detecting the contact force of the probe card while the substrate is supported by the support. The method also includes adjusting a position of a push base over the substrate based on the detected contact force, and adjusting the position of the push base over the substrate includes adjusting a plurality of first positioning elements in the support.