Probe Card Test Probes with Grounded Wire Winding for Noise Reduction

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Solution Overview

Problem

Traditional cantilever probe cards experience noise interference from electromagnetic interference during high-frequency tests, leading to inconsistent results and reduced productivity.

Innovation Solution

The probe card assembly features test probes with a conductive wire winding on their middle sections, connected to the grounding end, which reduces inductance and noise by ensuring a specific length and diameter relationship (L1≧L2+3.14 D1) to effectively transmit high-frequency signals.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a traditional cantilever probe card with closely arranged test probes is used, then the device structure is simple and easy to manufacture, but electromagnetic interference between probes causes noise and reduces measurement precision

Engineering Contradiction:
Improvetest result consistencyVSAvoidprobe structure complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent introduces an intermediate shielding structure (conductive shielding layer or ground probe) between adjacent signal probes. This intermediary element acts as a barrier to electromagnetic fields, preventing direct interference between neighboring probes while maintaining the overall probe card structure. The shielding layer is connected to ground potential, effectively diverting electromagnetic noise away from signal paths.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent modifies key geometric parameters of the probe structure, specifically increasing the spacing between adjacent probes or adjusting the probe tip dimensions and orientation. By changing these physical parameters, the electromagnetic coupling between probes is reduced, thereby decreasing noise and improving measurement precision without requiring complete structural redesign.

Inventive Principle:
Principle #35Parameter changes

2Productivity

If test probes are closely arranged to increase testing capacity, then productivity is improved, but electromagnetic interference increases causing noise and requiring repeated tests

Engineering Contradiction:
Improvetesting efficiencyVSAvoidelectromagnetic interference noise
Core Design Contradiction:
ProductivityVSObject-affected harmful factors

Solution Approach 1:

Ground probes or shielding structures are positioned between closely spaced signal probes to act as electromagnetic barriers. These intermediaries block or redirect electromagnetic fields, preventing noise coupling between adjacent signal probes while allowing the probes to remain closely arranged for high productivity.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent introduces ground probes that are maintained at ground potential between signal probes. By creating equipotential regions (grounded zones) between adjacent signal paths, electromagnetic interference is minimized as the ground probes provide a reference potential that stabilizes the electromagnetic environment and reduces noise coupling.

Inventive Principle:
Principle #12Equipotentiality

3Reliability

If traditional probe card structure is used for high-frequency testing, then device complexity is low, but signal transmission stability deteriorates due to increased noise and inductance

Engineering Contradiction:
Improvesignal transmission stabilityVSAvoidprobe card structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

Conductive shielding layers or ground probes are introduced as intermediary elements between signal paths. These structures provide electromagnetic shielding and reduce inductance by providing alternative current paths and stabilizing the electromagnetic field distribution, thereby improving signal transmission stability for high-frequency applications.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The probe card structure employs composite construction combining signal-conductive materials (for probe tips and signal paths) with electromagnetic shielding materials (conductive shielding layers). This composite approach integrates both signal transmission functionality and noise protection within a unified structure, enhancing reliability without proportionally increasing complexity.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances the accuracy and reduces noise in high-frequency tests, stabilizing signal transmission and reducing inductance between power and grounding probes.

Implementation Method 1

The conductive wire winding on the test probe has a length L1 and a wound part of the middle section has a length L2 while the insulation layer at the middle section of the test probe has an outer diameter D1, wherein for the probe card assembly to smoothly transmit high-frequency signals, it is preferred that L1, L2 and D1 are in a relation shown by the formula below: L1≧L2+3.14 D1

Methodology Applied
Scientific EffectInductance reduction: Electromagnetic Induction

Implementation Method 2

at least one of the test probes other than the grounding probe has an outer surface of its middle section wound by at least one conductive wire whose two ends are connected with a grounding end of the main body of the probe card assembly

Methodology Applied
Scientific EffectElectromagnetic shielding: Faraday Cage

Data Source

PatentUS20090315576A1Probe card assembly and test probes therein
Publication Date: 2009.12.24 KING YUAN ELECTRONICS
  • US20090315576A1 patent drawing
  • US20090315576A1 patent drawing
  • US20090315576A1 patent drawing

AI summary

Disclosed are a probe card assembly and test probes used therein. The probe card assembly includes a main body, a probe base provided at a center of the main body, and a plurality of test probes connecting the main body and the probe base. Therein, each of the test probes has a tip extending out from the probe base for contacting and testing a wafer. The test probes include at least one power probe, at least one grounding probe and a plurality of signal probes, wherein each of the test probes has a middle section between the main body and contains therein a core that is wrapped by an insulation layer.