Probe Card Shielding via Guide Plate ALD
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Solution Overview
Problem
Existing probe cards require complex and costly processes for depositing shielding structures on each probe, leading to increased production costs and precision issues, as well as additional complexity from grounding requirements.
Innovation Solution
A probe card design featuring a guide plate with a shielding structure made of electromagnetic absorption or reflection materials, deposited on the inner walls of guide holes using atomic layer deposition or etching, eliminating the need for grounding and shielding on individual probes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If insulating layer and shielding layer are coated on each probe, then signal interference is reduced, but production process becomes time-consuming and costly
Solution Approach 1:
The shielding function is segmented from individual probes and relocated to the guide plate structure. The guide plate is divided into multiple guide holes, each providing shielding for its corresponding probe without requiring coating on the probe itself. This segmentation allows parallel processing and eliminates the time-consuming step of coating each probe individually.
Solution Approach 2:
The guide plate serves as an intermediary structure that provides shielding for the probes indirectly. Instead of coating the probes directly, the guide plate with its integrated shielding structure acts as a mediator that surrounds and protects each probe within its guide hole, achieving the same shielding effect through a different structural approach.
2Object-affected harmful factors
If insulating layer and shielding layer are coated on each probe, then signal interference is reduced, but production costs increase
Solution Approach 1:
The shielding function is merged into the guide plate structure rather than being applied as separate coatings on each probe. The guide plate integrates multiple guide holes with shielding walls, creating a unified structure that provides shielding for all probes simultaneously. This merging reduces the total amount of insulating and shielding materials needed and eliminates multiple coating processes.
Solution Approach 2:
The guide plate performs multiple functions: it provides mechanical support for the probes, defines the positioning of each probe through guide holes, and provides electromagnetic shielding through its integrated shielding walls. This multi-functionality eliminates the need for separate shielding components and reduces overall manufacturing complexity and cost.
3Object-affected harmful factors
If insulating layer and shielding layer are coated on each probe, then signal interference is reduced, but probe precision is affected
Solution Approach 1:
The shielding function is segmented from the probe and relocated to the guide plate structure. By separating the shielding function from the probe itself, the probe's outer surface remains uncovered, preserving its original precision and measurement capabilities while still achieving electromagnetic shielding through the guide plate's structured walls.
4Object-affected harmful factors
If insulating layer and shielding layer are coated on each probe, then signal interference is reduced, but probability of damaging probe increases
Solution Approach 1:
The shielding layer is extracted from the probe and relocated to the guide plate structure. This extraction removes the vulnerable coated layers from the probe, eliminating the risk of coating delamination or damage during probe handling and operation, while the shielding function is maintained through the guide plate's robust structural walls.
5Object-affected harmful factors
If shielding layer is made of common metal material, then shielding is achieved, but additional grounding lines and circuits are required
Solution Approach 1:
The guide plate with its integrated shielding structure provides self-contained electromagnetic shielding without requiring external grounding connections. The shielding effect is achieved through the physical structure and material properties of the guide plate itself, eliminating the need for additional grounding lines, circuits, or external reference planes that would increase system complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design simplifies the production process, reduces costs, and effectively shields against electromagnetic interference without compromising measurement precision, enhancing the efficiency of integrated circuit testing.
Implementation Method 1
At least one layer of the shielding structure is made of an electromagnetic absorption material or an electromagnetic reflection material
Implementation Method 2
At least one layer of the shielding structure is made of an electromagnetic absorption material or an electromagnetic reflection material
Implementation Method 3
Each layer of the shielding structure is formed on the inner wall surface of the guide hole by atomic layer deposition or atomic layer etching
Data Source
AI summary
Provided is a probe card, comprising a guide plate and a shielding structure of single-layer or multi-layer. The guide plate comprises an upper surface, a lower surface, and at least one guide hole passing through the upper surface and the lower surface, and the guide hole is provided with an inner wall surface. At least one layer of the shielding structure is made of an electromagnetic absorption material or an electromagnetic reflection material, and the shielding structure is not connected to a ground. Each layer of the shielding structure is formed on the inner wall surface of the guide hole by means of atomic layer deposition or atomic layer etching, and a thickness of each layer is less than 1000 nm.