Semiconductor Probe Card with Integrated Hall Measurement Coil

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Solution Overview

Problem

Conventional methods cannot measure the charge carrier density of two-dimensional carrier gases in individual integrated HEMT devices during manufacturing, as hall measurements require dedicated equipment and are typically performed on bare semiconductor wafers before processing.

Innovation Solution

A semiconductor test apparatus with a probe test card featuring electrically conductive probes and an integrated electromagnet, which generates a magnetic flux to enable hall measurements on individual semiconductor devices using standard probing test equipment, allowing for the measurement of charge carrier density in HEMT devices under manufacture.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If conventional measurement methods are used, then measurements can only be performed on bare semiconductor wafers before processing, but this prevents measurement of charge carrier density in individual integrated HEMT devices during manufacturing

Engineering Contradiction:

Improvemeasurement capabilityVSAvoidmeasurement timing

Core Design Contradiction:

Adaptability or versatilityVSLoss of time

Solution Approach 1:

The patent combines the probe card with an integrated electromagnet system, merging the electrical probing function with magnetic field generation capability into a single test apparatus. This allows Hall effect measurements to be performed on individual devices during manufacturing without requiring separate measurement equipment or processes.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The probe card serves as an intermediary between the test equipment and the semiconductor devices, providing both electrical contact for current application and magnetic field generation for Hall effect measurement. This intermediary structure enables in-line measurement capabilities that were previously unavailable during manufacturing processes.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Measurement precision

If dedicated Hall measurement equipment is used, then accurate charge carrier density measurement is possible, but this increases device complexity and manufacturing cost

Engineering Contradiction:

Improvecharge carrier density measurementVSAvoidmeasurement equipment

Core Design Contradiction:

Measurement precisionVSDevice complexity

Solution Approach 1:

The probe card is designed with multi-functionality, serving both as an electrical contact mechanism for standard device testing and as an integrated electromagnet for Hall effect measurements. This universal design eliminates the need for separate dedicated Hall measurement equipment, reducing overall system complexity while maintaining measurement precision.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent merges the electrical probing function with magnetic field generation capability into a single integrated probe card system. By combining these functions, the invention achieves accurate charge carrier density measurement without requiring complex separate measurement equipment.

Inventive Principle:

Principle #5Merging (Combining)

3Reliability

If separate Hall measurement equipment is used, then magnetic flux can be generated for measurement, but this requires additional equipment and process steps

Engineering Contradiction:

Improvemeasurement capabilityVSAvoidequipment requirements

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

Inventive Principle:

Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables hall measurements on individual semiconductor devices using conventional wafer probing test equipment, effectively measuring charge carrier density and improving device performance assessment during manufacturing.

Implementation Method 1

applying a current through the coil thereby generating a magnetic flux towards the first semiconductor test site

Methodology Applied

Scientific EffectElectromagnetic induction: Electromagnetic Induction

Implementation Method 2

measuring a voltage across the first semiconductor test site in a direction parallel to the current flow and perpendicular to the magnetic flux

Methodology Applied

Scientific EffectHall effect: Hall Effect

Data Source

PatentUS20180328981A1Semiconductor Probe Test Card with Integrated Hall Measurement Features

Publication Date: 2018.11.15 INFINEON TECH AUSTRIA AG

AI summary

A probe test card for testing semiconductor devices includes a printed circuit board, a pair of electrically conductive probes extending towards one another and protruding away from the printed circuit board with a gap being disposed between ends of the pair of electrically conductive probes, and a coil affixed to and electrically connected to the printed circuit board and disposed directly over the gap. The probe test card is configured to generate a magnetic flux in the gap between the ends of the pair of electrically conductive probes upon the application of a current through the coil.