Probe Card Heat Radiation Structure for High-Current Inspection

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Solution Overview

Problem

The application of high currents in contact inspection devices leads to significant Joule heat generation, causing a rise in probe temperature and deterioration of the spring property, which compromises the probe's ability to maintain appropriate pressing force and lowers inspection accuracy.

Innovation Solution

Incorporating a heat radiation structure in the probe card that absorbs and dissipates heat generated by the probe, using high heat conductive materials to reduce the temperature rise and maintain the spring property of the probe.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Power

If high current is applied during energization inspection, then inspection capability is improved, but probe temperature rises and spring property deteriorates

Engineering Contradiction:
Improveinspection capabilityVSAvoidprobe temperature
Core Design Contradiction:
PowerVSTemperature

Solution Approach 1:

A heat radiation structure is introduced as an intermediary component between the probe and the surrounding environment. This structure specifically targets the spring property portion of the probe to absorb and radiate heat away, preventing temperature rise in the critical spring region while allowing high current to flow through the probe for inspection purposes.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The heat radiation structure is selectively applied only to the portion of the probe where the spring property appears, rather than treating the entire probe uniformly. This localized approach ensures that the spring property region maintains appropriate temperature and mechanical properties while other portions of the probe can handle high current without restriction.

Inventive Principle:
Principle #3Local quality

2Power

If high current is applied during energization inspection, then inspection capability is improved, but spring property deteriorates

Engineering Contradiction:
Improveinspection capabilityVSAvoidspring property
Core Design Contradiction:
PowerVSReliability

Solution Approach 1:

The heat radiation structure serves as a protective intermediary that absorbs thermal energy from the probe's spring property portion. By radiating this heat away, the structure prevents thermal degradation of the spring property, thereby maintaining reliability of the probe's mechanical characteristics even during high-current inspection operations.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The heat radiation structure is pre-installed on the probe to provide thermal protection before high current is applied. This preventive measure cushions the spring property portion against temperature rise and property deterioration that would otherwise occur during energization inspection, ensuring reliable operation throughout the inspection process.

Inventive Principle:
Principle #11Beforehand cushioning (Prior cushioning)

3Shape

If conventional guide films are used to maintain probe straightness, then probe alignment is improved, but heat radiation capability is insufficient

Engineering Contradiction:
Improveprobe straightnessVSAvoidheat dissipation
Core Design Contradiction:
ShapeVSTemperature

Solution Approach 1:

The guide portion is constructed using composite materials that simultaneously provide mechanical guidance for maintaining probe straightness and thermal properties for effective heat radiation. This composite structure integrates both alignment and thermal management functions into a single component, eliminating the need for separate guide films with limited thermal capability.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The guide portion is designed to perform multiple functions: it maintains probe straightness through its structural geometry while simultaneously radiating heat from the spring property portion through its thermal characteristics. This multi-functional design replaces the conventional single-function guide films, which only provided alignment without effective heat radiation capability.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The heat radiation structure effectively suppresses the rise in probe temperature, reducing the risk of spring property deterioration and maintaining inspection accuracy during high-current energization inspections.

Implementation Method 1

Joule heat greatly occurs and a temperature of a probe rises

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Implementation Method 2

a heat radiation structure that absorbs heat of the probe generated by energization and emits the heat to the outside of the probe

Methodology Applied
Scientific EffectHeat radiation: Thermal Radiation

Data Source

PatentEP3367108B1Probe card and contact inspection device
Publication Date: 2025.12.24 NIHON MICRONICS KK
  • EP3367108B1 patent drawingFigure 1
  • EP3367108B1 patent drawingFigure 2
  • EP3367108B1 patent drawingFigure 3

AI summary

An excessive rise in temperature of a probe is suppressed even in a case where a high current is applied during an energization inspection. A risk of a decrease in a spring property of the probe is reduced. Inspection accuracy of an energization inspection is increased. A probe card 11 of the present invention is a probe card that includes a probe 3 having a spring property and a probe head 15 that holds the probe 3. The probe head 15 includes a guide portion 27 that holds the probe 3 such that the probe 3 can move in an axis direction Z. The guide portion 27 includes a heat radiation structure 29 that absorbs heat of the probe 3 generated by energization and emits the heat to the outside of the probe 3.