Probe Card Loading Orientation Detection and Error Correction
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Solution Overview
Problem
Existing semiconductor test systems are inadequate in preventing damage to probe cards due to improper placement during loading, which can occur due to human error, leading to abnormal states such as being placed backwards or upside down.
Innovation Solution
The implementation of an interface device with check members and detection sensors that analyze the orientation of the probe card, ensuring it is properly aligned before loading into the test system, preventing damage by detecting abnormal states and guiding corrective adjustments.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If manual loading of probe card is used, then operation simplicity is maintained, but placement accuracy deteriorates leading to improper orientation
Solution Approach 1:
The system performs preliminary detection of probe card orientation and position before the loading process completes. Detection sensors check whether the probe card is correctly oriented on the carrier plate, and the system prevents loading if improper placement is detected, thereby ensuring placement accuracy while maintaining simple manual loading operation
Solution Approach 2:
The system provides feedback through detection sensors that monitor the probe card's orientation and position. When improper placement is detected, the system generates a signal to prevent loading and can display error information to guide operators to correct the placement, thus improving placement accuracy without complicating the loading operation
2Manufacturing precision
If detection sensors and check members are added, then probe card placement accuracy is improved, but device complexity increases
Solution Approach 1:
Check members serve as intermediaries between the probe card and detection sensors. These check members are simple structural elements that translate probe card orientation into detectable positions, allowing the detection sensors to easily determine correct placement without requiring complex sensing mechanisms, thus improving placement accuracy while minimizing added complexity
Solution Approach 2:
The detection system is designed to automatically detect probe card orientation and trigger appropriate responses without requiring external intervention. The system self-monitors placement accuracy and self-regulates the loading process by preventing operation when placement is incorrect, reducing the need for additional complex control mechanisms
Data Source
AI summary
A method for loading a probe card into a prober is provided. The method includes placing a probe card on a carrier plate and analyzing signals produced by two detection sensors. The detection sensor produces the correct signal when the probe card is placed in a normal state, and produces a false signal when the probe card is placed in an abnormal state. In addition, the method includes sending the probe card into the prober in response to the correct signals produced by both detection sensors. Alternatively, the method includes removing the probe card from the carrier plate and placing the probe card on the carrier plate again after adjustment of the probe card in response to a false signal produced by either of the detection sensors.