Probe Card Needle Shaping With Contactless Electrochemical Refinement

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Solution Overview

Problem

Existing probe card needles are prone to misalignment and uneven finishing due to physical contact with polishing pads, leading to inaccurate testing and reduced lifespan.

Innovation Solution

An electrochemical refinement process using electrolytic fluid and a conductive pattern structure to form needles without physical contact, ensuring precise alignment and uniform finishing.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If polishing pads are used to form needle shape, then manufacturing process is simple, but misalignment and uneven finishing occur

Engineering Contradiction:

Improvemanufacturing process simplicityVSAvoidneedle alignment and surface finishing

Core Design Contradiction:

Ease of manufactureVSManufacturing precision

Solution Approach 1:

The patent replaces the mechanical polishing system with an electrochemical system. Instead of using polishing pads that physically contact and wear the needle surface, the invention uses electrolytic fluid and electrical current to remove material through electrochemical reactions. This substitution eliminates the misalignment and uneven finishing problems caused by mechanical contact while maintaining manufacturing capability.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent introduces electrolytic fluid as an intermediary medium between the electrode (anode) and the material removal process. The electrolytic fluid enables controlled material removal through electrochemical reactions without direct mechanical contact, serving as a mediator that transfers energy from the electrical field to the material surface in a controlled manner, thereby achieving precise needle shaping.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Ease of manufacture

If polishing pads contact needles physically, then material removal is achieved, but needle lifespan is reduced

Engineering Contradiction:

Improvematerial removal capabilityVSAvoidneedle lifespan

Core Design Contradiction:

Ease of manufactureVSDuration of action of stationary object

Solution Approach 1:

The patent replaces mechanical material removal with electrochemical material removal. Instead of polishing pads that physically abrade and wear down the needle surface, the invention uses controlled electrochemical reactions to remove material. This eliminates the mechanical wear and stress that reduce needle lifespan while maintaining effective material removal capability for shaping.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The electrochemical process allows the needle (as electrode) to undergo controlled self-refinement through electrochemical reactions. The material removal occurs uniformly across the needle surface through the electrochemical field, providing a self-regulating process that maintains needle integrity and extends lifespan compared to external mechanical polishing.

Inventive Principle:

Principle #25Self-service

3Manufacturing precision

If electrochemical refinement is used, then manufacturing precision is improved, but device complexity increases

Engineering Contradiction:

Improveneedle alignment and surface finishingVSAvoidelectrochemical system complexity

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent utilizes changes in electrical parameters (current, voltage, electrolyte composition) to control the material removal process and achieve precise needle shaping. By adjusting these parameters, the system can control the rate and uniformity of material removal, enabling high manufacturing precision. The complexity is managed through parameter optimization rather than mechanical complexity.

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Reduces misalignment issues and improves surface finishing, enhancing the accuracy and longevity of probe card needles.

Implementation Method 1

removing respective portions from the conductive body by initiating a flow of electrons in the electrolytic fluid between the conductive pattern structure and the conductive body

Methodology Applied

Scientific EffectElectrochemical reactions: Electrolysis

Data Source

PatentUS20250290953A1Probe card needle shape and method of manufacturing

Publication Date: 2025.09.18 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD

AI summary

The present disclosure is directed to a method of manufacturing one or more needles of a probe card by refining and processing a conductive body that extends from the probe card to form a respective tip at the end of the respective conductive body. Forming the respective tip of a respective needle includes removing respective portions from the end of the conductive body by flowing an electrolytic fluid between a conductive pattern structure and an end of the respective conductive body. Removing the respective portions with the flow of the electrons may be performed in multiple successive steps to form various needles with various sizes, shapes, and profiles (e.g., cylindrical, rectangular, triangular, trapezoidal, etc.).