Probe Card Needle Electrochemical Refinement for Precise Alignment

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Solution Overview

Problem

Existing probe card needles are prone to misalignment and uneven finishing due to physical contact with polishing pads, leading to inaccurate testing and reduced lifespan.

Innovation Solution

An electrochemical refinement process using electrolytic fluid and a conductive pattern structure to form needles without physical contact, ensuring precise alignment and uniform finishing.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If polishing pads are used to form needle shape, then needle profile can be created, but misalignment and uneven finishing occur

Engineering Contradiction:
Improveneedle alignmentVSAvoidpolishing process complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent replaces the mechanical polishing system with an electrochemical etching system. Instead of using polishing pads that physically contact and mechanically remove material, the invention uses electrolytic fluid and electrical current to chemically etch the needle profile. This substitution eliminates the misalignment and uneven finishing problems caused by mechanical contact while maintaining the ability to create precise needle shapes.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the fundamental parameter of material removal from mechanical abrasion to electrochemical dissolution. By controlling electrical parameters (current, voltage, electrolyte composition) instead of mechanical parameters (polishing pressure, pad grit size), the process achieves more consistent and precise needle formation without the alignment issues inherent in mechanical polishing.

Inventive Principle:
Principle #35Parameter changes

2Manufacturing precision

If polishing pads contact needles, then material removal occurs, but uneven finishing and reduced lifespan result

Engineering Contradiction:
Improveneedle finishing uniformityVSAvoidprobe card lifespan
Core Design Contradiction:
Manufacturing precisionVSDuration of action of stationary object

Solution Approach 1:

The patent replaces mechanical polishing with electrochemical etching, eliminating the physical contact between polishing pads and needles. This substitution prevents the uneven finishing and mechanical stress that reduce probe card lifespan, while achieving uniform needle profiles through controlled electrolytic material removal.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent introduces electrolytic fluid as an intermediary medium between the power source and the needle. This fluid mediator enables material removal through electrochemical reactions without direct mechanical contact, resulting in more uniform finishing and reduced wear on the probe card components.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Manufacturing precision

If mechanical polishing is used, then needle shape is formed, but misalignment reduces testing accuracy

Engineering Contradiction:
Improveneedle shape accuracyVSAvoidtesting accuracy
Core Design Contradiction:
Manufacturing precisionVSMeasurement precision

Solution Approach 1:

The patent replaces mechanical polishing with electrochemical etching to form needle shapes. This substitution eliminates misalignment during the shaping process, ensuring that the needle profile is accurately formed without the positional deviations that occur with mechanical polishing, thereby maintaining both manufacturing precision and subsequent testing accuracy.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Reduces misalignment issues and improves needle finishing, enhancing testing accuracy and extending probe card lifespan.

Implementation Method 1

an electrochemical refinement process to remove respective portions from the conductive body

Methodology Applied
Scientific EffectElectrochemical refinement: Electrolysis

Implementation Method 2

initiating a flow of electrons in the electrolytic fluid between the conductive pattern structure and the respective tips of the plurality of conductive bodies

Methodology Applied
Scientific EffectIonic conduction: Conduction (electrical)

Data Source

PatentUS20250290952A1Probe card needle shape and method of manufacturing
Publication Date: 2025.09.18 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20250290952A1 patent drawing
  • US20250290952A1 patent drawing
  • US20250290952A1 patent drawing

AI summary

The present disclosure is directed to a method of manufacturing one or more needles of a probe card by refining and processing a conductive body that extends from the probe card to form a respective tip at the end of the respective conductive body. Forming the respective tip of a respective needle includes removing respective portions from the end of the conductive body by flowing an electrolytic fluid between a conductive pattern structure and an end of the respective conductive body. Removing the respective portions with the flow of the electrons may be performed in multiple successive steps to form various needles with various sizes, shapes, and profiles (e.g., cylindrical, rectangular, triangular, trapezoidal, etc.).