Positionable Probe Card Pin Alignment

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Solution Overview

Problem

The stability of probe cards is affected by inaccurate positioning of the probe head and space transformer, leading to unstable electrical transmission and inaccurate test results due to external forces and thermal expansion/contraction during testing, assembly, and transportation.

Innovation Solution

A positionable probe card design featuring a space transformer with apertures and positioning pins, where the pins are fixed using fixing rings or adhesives, and optionally with sleeves, to precisely align and secure the probe head, improving assembly accuracy and stability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If the probe head and space transformer are fixed independently, then the assembly process is simple, but the positioning accuracy is poor leading to unstable test results

Engineering Contradiction:

Improvepositioning accuracyVSAvoidassembly structure

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent combines the probe head and space transformer into a unified integrated structure where the probe head is directly mounted on the space transformer substrate. This merging eliminates the independent fixation of separate components, ensuring consistent positioning and eliminating the trade-off between assembly simplicity and positioning accuracy.

Inventive Principle:

Principle #5Merging (Combining)

2Adaptability or versatility

If the fixing element is movable to accommodate thermal expansion, then the structure has flexibility, but probe tail displacement occurs causing unstable electrical transmission

Engineering Contradiction:

Improvethermal adaptationVSAvoidelectrical transmission stability

Core Design Contradiction:

Adaptability or versatilityVSReliability

Solution Approach 1:

The patent applies different material properties to different parts of the fixing element. The fixing element incorporates materials with complementary thermal expansion coefficients - one material matches the space transformer substrate's thermal expansion while another matches the probe head's thermal expansion. This local differentiation allows each material to accommodate its respective component's thermal behavior while maintaining stable electrical connections.

Inventive Principle:

Principle #3Local quality

3Manufacturing precision

If the positioning pins are precisely fixed in apertures, then the assembly accuracy is improved, but the manufacturing process becomes more complex

Engineering Contradiction:

Improveassembly accuracyVSAvoidmanufacturing process

Core Design Contradiction:

Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The patent pre-forms positioning holes with precise dimensions and positions directly in the space transformer substrate before assembling the probe head. By establishing the precise positioning features in advance during substrate fabrication, the subsequent assembly process becomes simpler and more accurate, as the probe head can be directly mounted onto these pre-prepared positioning structures.

Inventive Principle:

Principle #10Preliminary action

Data Source

PatentUS11402407B2Positionable probe card and manufacturing method thereof

Publication Date: 2022.08.02 MPI CORP

AI summary

A positionable probe card includes a space transformer, a plurality of positioning pins, and a probe head. The space transformer includes a space transforming substrate, the space transforming substrate includes a plurality of apertures, and the positioning pins are respectively fixed in the apertures. The probe head includes a plurality of positioning holes, and the positioning pins are respectively inserted into corresponding positioning holes. In addition, a method of manufacturing a positionable probe card is also disclosed herein.