Probe Card Pressure Chamber Prevents Dielectric Breakdown
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Solution Overview
Problem
Existing probe cards face challenges in preventing dielectric breakdown during electrical testing of semiconductor wafers due to high voltages and small distances, which existing technologies struggle to address effectively.
Innovation Solution
The probe card features deflectable L-shaped or flared probe needles within an elastic limit, coupled with a pressure chamber that allows for precise control of gas pressure using a control system, ensuring the pressure is maintained within the chamber to prevent dielectric breakdown during testing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If high voltage is applied during electrical testing, then testing capability is improved, but dielectric breakdown risk increases
Solution Approach 1:
The patent introduces gas pressure as an intermediary medium between the probe needle and the integrated circuit. By applying controlled gas pressure, the dielectric strength of the gas increases, preventing breakdown while allowing high voltage testing. The gas acts as a mediator that enables high power operation without compromising reliability.
Solution Approach 2:
The patent changes the physical parameter of gas pressure to control dielectric breakdown. By dynamically adjusting the gas pressure parameter, the system can prevent dielectric breakdown at high voltages. The pressure control mechanism modifies the gas density and dielectric strength, allowing high voltage testing while maintaining reliability.
2Reliability
If gas pressure is increased to prevent dielectric breakdown, then reliability is improved, but device complexity increases
Solution Approach 1:
The probe needle structure is designed to be deflectable within its elastic limit, allowing it to self-adjust to pressure variations and maintain contact. The elastic deformation of the probe needle provides automatic compensation for pressure changes, reducing the need for complex active pressure control mechanisms while maintaining reliability.
Solution Approach 2:
The patent employs dynamic pressure control where the gas pressure can be adjusted during operation. The deflectable probe needle dynamically adapts to pressure changes through elastic deformation, creating a dynamic system that maintains reliability without requiring overly complex static pressure control mechanisms.
3Adaptability or versatility
If probe needle is made deflectable to accommodate pressure changes, then adaptability is improved, but manufacturing precision requirements increase
Solution Approach 1:
The probe needle is designed with specific material and geometric parameters that define its elastic behavior. By carefully selecting the material properties and dimensions, the probe needle achieves the desired deflectability within its elastic limit. The manufacturing precision is focused on controlling these key parameters to ensure the needle deflects appropriately without permanent deformation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively prevents dielectric breakdown by maintaining optimal gas pressure and allowing the probe needles to deflect within their elastic limits, ensuring accurate and reliable electrical testing of semiconductor wafers.
Implementation Method 1
a pressure chamber configured to maintain a gas pressure sufficient to prevent dielectric breakdown between the test points
Implementation Method 2
The probe needles are configured to deflect within the gap between the probe card and the integrated circuit under test within the elastic limit for the material of the probe needles
Data Source
AI summary
A system for testing an integrated-circuit wafer, the system including a probe card having a probe needle and a probe body enclosing a pressure chamber. The probe body includes a unitary sidewall, a first end cap substantially closing a first end of the probe body, except for an outlet passage in the first end cap, and an inlet passage configured to introduce compressed gas into the pressure chamber. The probe needle is within the pressure chamber and is supported by the probe body. A free end of the probe needle extends through the outlet passage. The ends of the probe needle are separated by a first bend in the probe needle, which has a center of curvature that is located between the probe needle and a longitudinal centerline of the unitary sidewall. Methods of using a probe card are also disclosed.