Probe Card Pressure Space Design for High Voltage Testing

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Solution Overview

Problem

Probe cards face challenges in high voltage testing due to limited high voltage tolerance and pressure resistance, leading to potential damage during device testing.

Innovation Solution

A probe card design featuring a wiring board, top cover, retractable structure with vent and jet holes, and a probe that extends into a pressure space, allowing for high pressure gas supply to increase pressure tolerance and prevent short circuits, while the retractable structure moves to avoid device contact.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If the probe card is used in high voltage testing, then the testing capability is improved, but the risk of short circuit and device damage increases

Engineering Contradiction:

Improvehigh voltage testing capabilityVSAvoidshort circuit risk

Core Design Contradiction:

Adaptability or versatilityVSObject-affected harmful factors

Solution Approach 1:

The patent introduces high pressure gas as an intermediary substance between the probe and device under test. The gas fills the isolation space and acts as a mediator that prevents direct contact and electrical discharge, allowing high voltage testing while preventing short circuits through the physical barrier and increased breakdown voltage of the pressurized gas environment.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The probe card structure is segmented into distinct functional zones: a pressure space for housing the probe, an isolation space separated by a retractable structure, and vent holes for pressure control. This segmentation allows the high voltage testing function to be isolated in the pressure space while the retractable structure creates a separate isolation zone that prevents harmful electrical discharge from affecting the device under test.

Inventive Principle:

Principle #1Segmentation

2Ease of manufacture

If the probe card structure is simplified, then the manufacturing cost is reduced, but the high voltage tolerance and pressure resistance are limited

Engineering Contradiction:

Improvemanufacturing simplicityVSAvoidhigh voltage tolerance

Core Design Contradiction:

Ease of manufactureVSReliability

Solution Approach 1:

The retractable structure acts as a flexible barrier that can be moved between extended and retracted positions. When extended, it creates an isolation space that provides high voltage tolerance; when retracted, it allows probe contact with the device. This flexible approach maintains reliability for high voltage testing while using a relatively simple mechanical structure that is easier to manufacture compared to rigid complex assemblies.

Inventive Principle:

Principle #30Flexible shells and thin films

3Object-affected harmful factors

If the retractable structure is extended to isolate the probe, then the device protection is improved, but the contact with device under test is prevented

Engineering Contradiction:

Improvedevice protectionVSAvoidprobe contact capability

Core Design Contradiction:

Object-affected harmful factorsVSEase of operation

Solution Approach 1:

The retractable structure is designed to be dynamically movable between extended and retracted states. When extended, it provides isolation and device protection by creating a physical barrier and isolation space; when retracted, it allows the probe to contact the device under test for testing. This dynamic capability enables the system to switch between protection mode and testing mode, resolving the contradiction between device protection and contact capability.

Inventive Principle:

Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enhances high voltage tolerance and testing performance by maintaining high pressure in the probe card's pressure space, reducing the risk of short circuits and device damage during testing.

Implementation Method 1

the probe card should be suitable to be utilized in a high pressure environment (such as a pressure higher than three times of the atmospheric pressure) in order to increase the high voltage tolerance

Methodology Applied

Scientific EffectDielectric breakdown prevention through gas pressurization: Dielectric

Data Source

PatentUS10168359B2Probe card for high voltage testing

Publication Date: 2019.01.01 MPI CORP

AI summary

A probe card includes a wiring board, a top cover, a retractable structure and a probe. The top cover couples with the wiring board and has an air inlet. The retractable structure connects with the top cover and includes a first and a second rings. The first ring has vent holes. A top surface of the first ring and a first bottom surface of the top cover define a homogenized space communicating with the air inlet and the vent holes. The second ring couples with the first ring and has jet holes communicating with the vent holes. Outlets of the jet holes locate on a second bottom surface of the second ring. A first inner sidewall of the first ring and a second inner sidewall of the second ring define a pressure space. The probe connects with the wiring board and extends to the pressure space.