Probe Card Circuit Protection Using Self-Resetting Fuses
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Solution Overview
Problem
During Chip Probe (CP) testing, fault currents can cause needle burning or melting in probe card devices, leading to probe failure and increased maintenance and inspection times.
Innovation Solution
A probe card device with a circuit protection assembly that includes an insulation plate, self-resetting fusing elements, and an array of through holes, which reversibly breaks down fault currents to prevent probe damage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If electrical inspection is performed on semiconductor elements using probe card, then inspection capability is achieved, but fault currents cause needle burning or melting leading to probe failure
Solution Approach 1:
A circuit protection assembly is introduced as an intermediary component between the wiring board and the probe head. This assembly includes a plurality of protection units, each containing a self-resetting fusing element connected in series with the corresponding probe. The self-resetting fusing element acts as a mediator that selectively blocks fault currents while allowing normal inspection currents to pass through, thereby protecting the probe from needle burning or melting caused by fault currents.
2Reliability
If probes are protected against fault currents, then probe failure rate is reduced, but device complexity increases due to additional circuit protection assembly
Solution Approach 1:
The circuit protection assembly is segmented into multiple independent protection units, with each unit corresponding to a specific probe. Each protection unit contains a self-resetting fusing element that operates independently. This segmentation allows the protection function to be distributed across multiple simple units rather than requiring a single complex protection mechanism, thereby reducing overall device complexity while maintaining reliability.
Solution Approach 2:
The self-resetting fusing element automatically detects and responds to fault currents without requiring external intervention. When a fault current exceeds the rated current, the fusing element transitions to a high-resistance state to block the fault current, and automatically resets when the fault is removed. This self-service capability eliminates the need for complex external protection circuits or manual intervention, simplifying the overall device structure.
3Ease of repair
If self-resetting fusing elements are added to protect probes, then maintenance cost is reduced, but manufacturing cost increases
Solution Approach 1:
The self-resetting fusing element is designed as a low-cost component that can be easily integrated into the circuit protection assembly. While individual fusing elements have limited service life under fault conditions, their low cost and the ability to reset them automatically make them economically viable compared to replacing expensive probes. The use of standard self-resetting fusing components keeps manufacturing costs manageable while significantly reducing maintenance costs by preventing probe failures.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces the likelihood of probe failure and enhances continuous electrical inspection by preventing needle burning or melting, thereby decreasing maintenance costs and inspection times.
Implementation Method 1
Each of the self-resetting fusing elements is electrically connected to one of the first contacts and one of the first conductive probes for reversibly breaking down electric currents from the wiring board to the one of the first conductive probes
Data Source
AI summary
A probe card device includes a wiring board provided with a plurality of contacts, a probe head having a probe holder and a plurality of conductive probes arranged on the probe holder, respectively, and a circuit protection assembly including an insulation plate, a plurality of through holes and a plurality of self-resetting fusing elements. The insulation plate is sandwiched between the wiring board and the probe head. The through holes are respectively formed on the insulation plate and arranged in an array form. The self-resetting fusing elements are respectively disposed within the through holes. Each of the self-resetting fusing elements is electrically connected to one of the contacts and one of the conductive probes for reversibly breaking down electric currents from the wiring board to the conductive probe.