Probe Card Resistor for Temperature Stability Monitoring
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Solution Overview
Problem
Conventional inspection devices face challenges in accurately determining the positional stability of probe card tips during preliminary temperature control, especially when multiple probes are involved, leading to prolonged inspection times and reduced throughput.
Innovation Solution
Incorporating a short-circuit line as an electrical resistor on the probe card, connected to conductive lines that transmit electric signals, allowing the tester to measure resistance changes and determine temperature stability and positional stability of the probe tips.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If conventional inspection devices use multiple probes on a probe card for inspection, then the inspection capability is improved, but the ability to accurately determine positional stability of probe tips during temperature control deteriorates
Solution Approach 1:
The probe card is divided into functional segments: inspection probes for substrate testing and a separate resistor element for temperature monitoring. This segmentation allows the inspection probes to maintain multiple contact points while the dedicated resistor provides accurate positional stability feedback without being affected by inspection operations.
Solution Approach 2:
A resistor is introduced as an intermediary element on the probe card that indirectly indicates the positional stability of the probes. Instead of directly measuring probe tip positions, the system uses the resistor's electrical properties as a mediator to infer temperature and positional stability, enabling accurate monitoring even with multiple probes.
2Measurement precision
If preliminary temperature control is performed on the probe card to ensure stable probe tip positions, then the inspection accuracy is improved, but the inspection time increases
Solution Approach 1:
The resistor on the probe card provides real-time feedback about temperature and positional stability during the inspection process. This continuous feedback eliminates the need for extended preliminary temperature control periods, as the system can dynamically adjust and verify stability without time-consuming pre-heating or pre-cooling cycles.
Solution Approach 2:
The resistor is pre-installed on the probe card during manufacturing, enabling temperature and positional stability monitoring to be ready before inspection begins. This preliminary preparation of the measurement system allows immediate accurate monitoring without requiring additional setup or prolonged stabilization periods.
3Stability of the object's composition
If the probe card is heated during preliminary temperature control, then the probe tip positional stability is improved, but the energy consumption increases
Solution Approach 1:
The system replaces mechanical or thermal trial-and-error methods for ensuring probe stability with electrical measurement using the resistor. Instead of relying on extended heating to achieve stability, the electrical properties of the resistor provide direct information about temperature and position, enabling more energy-efficient temperature control.
Solution Approach 2:
The system monitors changes in electrical resistance parameters to detect temperature and positional stability changes. By tracking resistance variations rather than relying on fixed thermal protocols, the system can adapt heating requirements dynamically, reducing energy consumption while maintaining probe tip stability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate determination of probe tip stability during preliminary temperature control, even with multiple probes, thereby reducing the inspection time and improving throughput by using resistance measurements.
Implementation Method 1
at least one resistor formed at the probe card and serving as an electrical resistor. The tester is further configured to measure a resistance of the at least one resistor based on the electric signals transmitted and received through the conductive lines.
Data Source
AI summary
An inspection device for inspecting an inspection target substrate includes a probe card, a tester, a plurality of conductive lines, and a resistor. The probe card has probes to be in contact with the inspection target substrate. The tester is configured to transmit and receive electric signals for an inspection to and from the inspection target substrate through the probes. The conductive lines electrically connect the probe card with the tester, and at least a part of the conductive lines is electrically connected to the probes. The resistor is formed at the probe card and serves as an electrical resistor. The tester is further configured to measure a resistance of the resistor based on the electric signals transmitted and received through the conductive lines.