Probe Card Stepped Structure Uniform Contact Pressure
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Solution Overview
Problem
Cantilever probes in probe cards exert different forces on electrical contacts at inner and outer rows of semiconductor devices, leading to inaccurate testing and increased reassembly difficulties due to varying indentation marks.
Innovation Solution
A probe loader device with a three-dimensional stepped structure and probe modules, where cantilever probes of equal length extend from each step surface to ensure consistent contact pressure across different electrical contacts, reducing the complexity of reassembly.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If cantilever probes of different lengths are used to touch electrical contacts at inner and outer rows, then the probes can reach different electrical contacts, but the probes exert different forces causing varying indentation marks and inaccurate testing
Solution Approach 1:
The patent applies local quality by creating different step heights in the support structure corresponding to different electrical contact rows. Each step position provides localized support at a specific height, allowing probes to reach different rows while maintaining uniform probe lengths and consistent contact forces.
2Adaptability or versatility
If cantilever probes exert different forces on electrical contacts at different rows, then the probes can reach all electrical contacts, but the reassembly process becomes more difficult and time-consuming
Solution Approach 1:
The patent implements preliminary action by pre-configuring the support structure with stepped portions at specific heights before the testing process. This preliminary structural arrangement automatically positions probes at correct heights for different rows, eliminating the need for time-consuming adjustments during reassembly.
3Manufacturing precision
If uniform moment lengths are maintained for all cantilever probes, then consistent contact pressure is achieved, but the structural complexity increases
Solution Approach 1:
The patent resolves the contradiction by transitioning from a one-dimensional linear support structure to a three-dimensional stepped structure. The vertical dimension (height) is used to compensate for different distances to electrical contacts, allowing uniform probe moment lengths while maintaining consistent contact pressure across all rows.
Data Source
AI summary
A probe loader device includes a carrier board, a three-dimensional stepped structure and a probe module having a plurality of probe pin layers separately stacked together in three-dimensional stepped structure. The three-dimensional stepped structure is connected to the carrier board. Each of the probe pin layers includes a plurality of cantilever probes. The cantilever probes respectively extend outwards from different steps of the three-dimensional stepped structure, and physical touch a plurality of electrical contacts of a DUT. A portion of each of the cantilever probes extending outwards from the three-dimensional stepped structure has a moment length, and the moment lengths of the cantilever probes of the different probe pin layers are the same.