Probe Card Support Structure for Stable Wafer Test Contact
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Solution Overview
Problem
The reliability of semiconductor test processes is compromised due to unstable electrical contacts during the connection of wafers with probe cards in semiconductor test devices.
Innovation Solution
A semiconductor test apparatus is designed with a base plate, side supporters, elastic cylinders, and stoppers that can be selectively locked, along with a top plate and substrate cover, to enhance the stability and reliability of electrical connections.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional semiconductor test device structure is used, then the device complexity is low, but the reliability of electrical contact between wafer and probe card is unstable
Solution Approach 1:
The base plate is divided into multiple functional regions with separate stoppers (center stopper and side stoppers) that can be independently adjusted and locked. This segmentation allows precise control of probe card positioning at different locations, improving electrical contact stability without requiring complete structural redesign.
Solution Approach 2:
The stoppers are pre-positioned and adjustable before the probe card is installed. The center stopper and side stoppers can be adjusted to predetermined positions and locked in place, ensuring proper probe card alignment and stable electrical contact before testing begins.
2Reliability
If adjustable stoppers are added to improve probe card positioning, then the electrical contact stability improves, but the device complexity increases
Solution Approach 1:
The center stopper and side stoppers are integrated into a unified base plate structure, sharing common mounting features and locking mechanisms. This merging reduces the number of separate adjustment systems needed while maintaining positioning stability across different probe card locations.
Solution Approach 2:
The stoppers serve multiple functions: they provide mechanical positioning, enable adjustable positioning through rotation, and maintain stable electrical contact when locked. This multi-functionality reduces the need for separate adjustment mechanisms for each function.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus improves the reliability of semiconductor tests by providing stable electrical connections, reducing the likelihood of errors and enhancing the overall performance of the semiconductor test process.
Implementation Method 1
an elastic cylinder and a side stopper on a lower surface of each of the plurality of side supporters
Data Source
AI summary
A semiconductor test apparatus includes a base plate, side supporters provided as three or more on a lower surface of the base plate, an elastic cylinder and a side stopper provided on a lower surface of each of the side supporters, a center stopper provided laterally apart from the side supporters on the lower surface of the base plate, a stopper foot provided at one end of the center stopper, a foot supporter provided at one end of the stopper foot, a top plate disposed under the base plate to contact the elastic cylinder and the side stopper, the top plate including a center hole in a center portion thereof, and a substrate cover provided under the top plate, wherein the center stopper and the side stopper are selectively locked.