Probe Card Thin Film Substrate Segmentation for Layout Density
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Solution Overview
Problem
The existing probe card devices face a trade-off between layout density and support function due to the material properties of the transforming plate, where hard materials enhance support but limit layout density, and soft materials improve layout but compromise support.
Innovation Solution
A probe card device design featuring a thin film substrate with inner metal layers and distinct connecting points on its surfaces, which provides a layout function by connecting pins with narrow pitches to a circuit board or device under test with wide pitches, while a separate element, such as a circuit board or device under test board, handles the support function, allowing for enhanced layout and support simultaneously.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If the transforming plate is made of hard material to enhance support function, then support force is improved, but layout density is limited (pitches cannot be decreased)
Solution Approach 1:
The transforming plate is divided into multiple layers: a first transforming plate layer (1021) made of soft material for high layout density, and a second transforming plate layer (1022) made of hard material for support. This segmentation allows each layer to specialize in one function, resolving the contradiction between support force and layout density.
Solution Approach 2:
The transforming plate uses composite structure combining soft material (first layer) and hard material (second layer). The soft first layer enables narrow pitches and high layout density, while the hard second layer provides sufficient support force, achieving both requirements simultaneously through material composition.
2Area of moving object
If the transforming plate is made of soft material to improve layout density, then layout function is enhanced, but support function is decreased
Solution Approach 1:
The transforming plate is segmented into functional layers where the first transforming plate layer (1021) made of soft material handles layout function with high density, while the second transforming plate layer (1022) made of hard material handles support function. This division resolves the contradiction by assigning each function to appropriate material.
Solution Approach 2:
The composite structure of soft first layer and hard second layer allows the soft material to enable narrow pitches for improved layout density, while the hard material compensates for support force deficiency, achieving both layout enhancement and adequate support.
Data Source
AI summary
A probe card device includes a plurality of pins; a thin film substrate including a plurality of first thin film connecting points and a plurality of second thin film connecting points, wherein at least one of the first thin film connecting points is electrically connected to at least one the second thin film connecting points, and a pitch of any two adjacent ones of the first film connecting points is less than a pitch of any two adjacent ones of the second film connecting points; and a circuit board including a plurality of first circuit board connecting points, wherein at least one of the second thin film connecting points is electrically connected to at least one of the first circuit board connecting points. The probe card device can enhance a layout function and a support function at the same time.


