Probe Card Vacuum Chamber Segmentation for Flatness Control
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Solution Overview
Problem
In contact inspection devices for semiconductor integrated circuits, the variation in processing accuracy of intermediate bodies can lead to uneven vacuum conditions, causing the probe card to bend and lose flatness, which affects the ability to maintain the required flatness of probe tips during the energization test.
Innovation Solution
The use of multiple vacuum chambers between the probe card and the connection body allows for individual control of vacuum levels, preventing deformation and maintaining probe tip flatness through pressure sensors and adjusting mechanisms.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single vacuum chamber is used to unite the probe card and connection body, then the structure is simple, but the probe card bends due to uneven vacuum conditions caused by processing variations of intermediate bodies
Solution Approach 1:
The single vacuum chamber is divided into multiple independent vacuum chambers (first vacuum chamber and second vacuum chamber) that can be controlled separately. This segmentation allows independent adjustment of vacuum levels in different regions, preventing probe card bending caused by processing variations of intermediate bodies while maintaining overall structural simplicity.
2Reliability
If the entire inspection unit is replaced due to probe wear, then inspection function is restored, but economic cost increases significantly
Solution Approach 1:
The inspection unit is divided into replaceable modules: the probe card can be independently replaced from the connection body and reference body. This modular design allows replacement of only the worn probe card rather than the entire inspection unit, restoring inspection function while significantly reducing economic cost.
3Manufacturing precision
If multiple vacuum chambers are used to control vacuum levels individually, then probe card flatness is maintained, but device complexity increases
Solution Approach 1:
The vacuum system is segmented into multiple independently controllable chambers, each with its own vacuum level adjustment capability. This allows precise control of vacuum levels in different regions to maintain probe card flatness while keeping the overall structure manageable through modular design.
Solution Approach 2:
The vacuum level (pressure parameter) in each vacuum chamber can be independently adjusted to optimal values. By changing the vacuum parameter individually in each chamber, the system compensates for processing variations of intermediate bodies and maintains probe card flatness without requiring complex mechanical structures.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution ensures that the probe card remains flat, maintaining the required flatness of probe tips and preventing bending, thereby ensuring accurate contact during energization tests without the need for replacing the entire inspection unit.
Implementation Method 1
a vacuum chamber, which is decompressed into a vacuum state, is formed between the probe card and the connection body
Implementation Method 2
the vacuum chamber is decompressed into a desired vacuum state (decompressed state) with a vacuum pump or the like
Data Source
AI summary
An inspection unit in which a probe card is united with a connection body via a vacuum chamber. It prevents flatness of tips of probes provided on the probe card from worsening when the probe card is united with a connection body by suction force (negative pressure) of the vacuum chamber. The inspection unit includes a probe card with probes on a first surface and a connection body united with a second surface of the probe card via a first vacuum chamber. The first chamber is formed with a plurality of chambers.