Elastic Resin Probe Card Wire Terminals
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The increasing narrow pitch of electrode pads on test objects requires narrower contact terminals on probe cards, while also necessitating controlled contact pressure to avoid damage and contact failure.
Innovation Solution
A probe card design featuring a wiring substrate with elastic resin portions and contact terminals formed from the end of wires buried within these resin portions, which are connected to connection pads via wire bonding, allowing for adjustable contact pressure and precise alignment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the pitch of contact terminals is reduced to match narrower electrode pads, then measurement capability is improved, but manufacturing precision and contact reliability deteriorate
Solution Approach 1:
The contact terminal is designed with a flexible wire structure that can dynamically adjust its position and contact pressure. The wire can bend and deform to accommodate alignment variations, maintaining reliable contact even with pitch variations, thus resolving the contradiction between narrow pitch measurement capability and contact reliability.
Solution Approach 2:
The invention changes the physical parameters of the contact terminal by using a flexible wire instead of a rigid structure. The wire's flexibility allows it to adapt to manufacturing tolerances and alignment variations, maintaining contact reliability while enabling narrower pitch measurements.
2Reliability
If contact pressure is increased to ensure reliable contact, then contact reliability is improved, but damage to electrode pads increases
Solution Approach 1:
The flexible wire structure allows contact pressure to be dynamically adjusted based on the contact condition. The wire can deform to achieve reliable contact while automatically limiting the maximum pressure to prevent damage to the electrode pads, resolving the contradiction between contact reliability and damage prevention.
Solution Approach 2:
The flexible wire acts as a cushioning element that absorbs excess contact force before it reaches the electrode pad. This beforehand cushioning prevents damage while ensuring sufficient contact pressure for reliable measurement.
3Object-affected harmful factors
If contact pressure is decreased to prevent damage to electrode pads, then harmful effects are reduced, but contact reliability deteriorates
Solution Approach 1:
The flexible wire structure dynamically adapts to achieve optimal contact pressure - sufficient for reliable contact but not excessive to cause damage. The wire's elasticity allows it to maintain consistent contact force within a safe range, resolving the contradiction between preventing damage and ensuring contact reliability.
4Ease of manufacture
If conventional rigid contact terminals are used, then manufacturing is simpler, but adaptability to different contact conditions deteriorates
Solution Approach 1:
The invention uses a flexible wire structure that can adapt its shape and contact pressure to different contact conditions. This provides versatility in handling various electrode pad configurations and alignment conditions, while the wire bonding manufacturing process remains relatively simple and cost-effective.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enables reliable measurement of electric characteristics by ensuring accurate contact and minimizing damage to test objects, while allowing for efficient manufacturing and cost-effective production.
Implementation Method 1
connecting an inside of each of the concave portions of the metal base material and the connection pads of the wiring substrate by a wire of a wire bonding method respectively
Implementation Method 2
forming a resin portion formed of a material having elasticity in the opening portion of the wiring substrate
Data Source
AI summary
A probe card includes a wiring substrate including an opening portion and a connection pad arranged on an upper face of the wiring substrate located on the periphery of the opening portion, a resin portion formed in the opening portion of the wiring substrate, and the resin portion formed of a material having elasticity, a contact terminal arranged to protrude from the lower face of the resin portion, and wire buried in the resin portion and connecting the contact terminal and the connection pad, wherein the contact terminal is formed of an end part of the wire, and is formed integrally with the wire.