Probe Device Movable Support Unit Transfer Accuracy

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Solution Overview

Problem

The existing probe device suffers from reduced transfer accuracy and alignment precision due to downward inclination of the support member under load, causing non-uniformity and misalignment of needle traces during contact with the needle trace transfer member.

Innovation Solution

A probe device with a movable support unit that vertically supports the support base, preventing downward inclination by using a lock mechanism to maintain perpendicular contact between the probes and the needle trace transfer member, ensuring accurate transfer and alignment.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If the probes and the needle trace transfer member are brought into contact with each other, then the needle traces can be transferred, but a large load is applied to the needle trace transfer member causing the support member to incline downward and deteriorating the transfer accuracy

Engineering Contradiction:

Improvetransfer accuracy of needle tracesVSAvoidstability of support member

Core Design Contradiction:

Manufacturing precisionVSStability of the object's composition

Solution Approach 1:

The invention introduces a movable support unit that applies an upward supporting force to counterbalance the downward load applied to the needle trace transfer member during probe contact. This counterweight mechanism prevents the support member from inclining downward, maintaining stability and transfer accuracy simultaneously

Inventive Principle:

Principle #8Anti-weight (Counterweight)

Solution Approach 2:

The movable support unit acts as an intermediary element between the mounting table and the needle trace transfer member. It mediates the load transmission by providing dynamic support that compensates for the downward force, thereby preventing inclination while allowing the transfer function to proceed

Inventive Principle:

Principle #24Intermediary (Mediator)

2Manufacturing precision

If the support member is inclined downward under load, then the contact between probes and needle trace transfer member occurs, but the shape of needle traces becomes non-uniform and positions become misaligned

Engineering Contradiction:

Improveuniformity and alignment of needle tracesVSAvoidload on needle trace transfer member

Core Design Contradiction:

Manufacturing precisionVSForce

Solution Approach 1:

The movable support unit provides a counterbalancing upward force that offsets the downward load from probe contact. This prevents the support member from inclining, thereby maintaining uniform needle trace shapes and accurate positional alignment even under applied load

Inventive Principle:

Principle #8Anti-weight (Counterweight)

Solution Approach 2:

The support unit is designed to be movable rather than fixed, allowing it to dynamically adjust its position and supporting force in response to the varying load during the transfer process. This dynamic adaptation ensures consistent transfer accuracy regardless of the applied force magnitude

Inventive Principle:

Principle #15Dynamics

Data Source

PatentUS11221350B2Probe device for improving transfer accuracy of needle traces of probes and needle trace transcription method therefor

Publication Date: 2022.01.11 TOKYO ELECTRON LTD

AI summary

A probe device according to an embodiment is a probe device for inspecting electrical characteristics of an inspection target object, mounted on a mounting table, by electrically contacting probes and the inspection target object to each other. The probe device includes a support base having on an upper surface thereof a needle trace transfer member for transferring needle traces of the probes, a fixed support portion extending from a side of the mounting table and configured to fix and support the support base from below, and a movable support unit that is disposed below the support base and is configured to be moved up and down to be in contact with the support base and movably support the support base.