Probe Apparatus Elastic Retainer for Non-Contact Coupling Gap
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Solution Overview
Problem
Conventional probe cards face challenges in achieving optimal non-contact coupling with semiconductor wafers due to the difficulty in matching the height of non-contact and contact coupling terminals, leading to a gap between the non-contact coupling terminal and the wafer, which cannot be adjusted.
Innovation Solution
A probe apparatus with a retaining section that allows the relative position between the contact and non-contact sections to be displaced, utilizing a thin film section with elasticity and conductive rubber to adjust the distance between the non-contact section and the semiconductor wafer, enabling precise positioning for effective signal exchange.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If contact coupling terminals are made longer to achieve proper contact coupling, then contact coupling reliability is improved, but a gap is created between non-contact coupling terminals and the semiconductor wafer, worsening non-contact coupling efficiency
Solution Approach 1:
The retaining section is designed with elastic deformation capability, allowing the non-contact coupling terminal to dynamically adjust its position. When the probe card contacts the semiconductor wafer, the retaining section elastically deforms to bring the non-contact coupling terminal closer to the wafer surface, optimizing the gap distance for efficient magnetic field coupling while maintaining reliable contact coupling through the longer contact terminals.
2Loss of energy
If non-contact coupling terminals are made shorter to reduce the gap with the semiconductor wafer, then non-contact coupling efficiency is improved, but contact coupling reliability deteriorates due to insufficient length
Solution Approach 1:
The probe card is segmented into functionally independent components: contact coupling terminals for electrical contact, non-contact coupling terminals for magnetic field coupling, and a retaining section that selectively positions each type. This segmentation allows each terminal type to be optimized for its specific function without compromising the other, as the retaining section manages the spatial relationship between them.
3Manufacturing precision
If non-contact coupling terminals are fixed rigidly to the substrate, then manufacturing precision is improved, but the ability to adjust the distance to the semiconductor wafer is lost, worsening coupling efficiency
Solution Approach 1:
The retaining section's elastic modulus and geometric parameters are carefully selected to provide appropriate flexibility. The section undergoes controlled elastic deformation under contact load, changing the position parameter of the non-contact coupling terminal to optimize the gap distance with the semiconductor wafer surface, thereby achieving efficient coupling while maintaining manufacturing precision in the overall structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for improved connection reliability and adjustment of the distance between the non-contact section and the semiconductor wafer, enhancing the signal exchange efficiency and reliability of both contact and non-contact coupling.
Implementation Method 1
utilizing a thin film section with elasticity and conductive rubber to adjust the distance between the non-contact section and the semiconductor wafer
Implementation Method 2
exchanging signals with a target device by non-contact coupling by means of magnetic field coupling and electric field coupling
Implementation Method 3
exchanging signals with a target device by non-contact coupling by means of magnetic field coupling and electric field coupling
Data Source
AI summary
A probe apparatus exchanging signals with a target device, includes: a contact section electrically connected to the target device by contacting a terminal of the target device; a non-contact section that exchanges signals with the target device in a state not contacting the terminal of the target device; and a retaining section that retains the contact section and the non-contact section, in such a manner that a relative position between the contact section and the non-contact section in a connection direction connecting the non-contact section and a region corresponding to the target device is displaceable.