Semiconductor Probe Evaluation Apparatus Partial Discharge Prevention

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Existing evaluation apparatuses for semiconductor devices with vertical structures face challenges in preventing partial discharge during electrical characteristic evaluation, which can lead to malfunction and are not effectively addressed by existing techniques that rely on sealed or non-sealed pressure vessels, as foreign substances on the devices can create discharge paths.

Innovation Solution

An evaluation apparatus with a stage and an upper component that can come into proximity and separate, featuring probes on the undersurface of the upper component, a sidewall part enclosing the probe, and gas supplying parts to increase pressure in the measurement space, preventing partial discharge by removing foreign substances before evaluation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If pressure is applied to prevent partial discharge using sealed pressure vessel or non-sealing pressure application, then partial discharge prevention is improved, but foreign substances on the device can create discharge paths reducing effectiveness

Engineering Contradiction:

Improvepartial discharge preventionVSAvoidforeign substance discharge paths

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The gas supply unit supplies gas to blow away foreign substances from the semiconductor device and probe contact areas before the evaluation process begins. This preliminary cleaning action removes potential discharge paths created by foreign substances, ensuring that subsequent pressure application during evaluation is effective in preventing partial discharge.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The invention uses gas (pneumatic) flow from the gas supply unit to remove foreign substances from the measurement area. The gas flow creates a clean environment by blowing away contaminants that could otherwise create discharge paths, complementing the pressure application method for partial discharge prevention.

Inventive Principle:

Principle #29Pneumatics and hydraulics

2Adaptability or versatility

If the number of pins is increased to meet high current and high voltage application demands, then electrical characteristic evaluation capability is improved, but the complexity of the evaluation apparatus increases

Engineering Contradiction:

Improvehigh current and high voltage evaluation capabilityVSAvoidnumber of pins

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The chuck stage with its electrode acts as an intermediary that provides a common reference potential for multiple probes. By using the chuck stage electrode as a shared reference, the apparatus can evaluate multiple high-current pins simultaneously without requiring each pin to have separate reference connections, thus reducing overall system complexity while maintaining high current evaluation capability.

Inventive Principle:

Principle #24Intermediary (Mediator)

3Ease of operation

If vacuum suction is used to fix the installation surface of the semiconductor device to the chuck stage, then device fixation is improved, but the risk of partial discharge between probes and chuck stage increases

Engineering Contradiction:

Improvedevice fixationVSAvoidpartial discharge risk

Core Design Contradiction:

Ease of operationVSReliability

Solution Approach 1:

The chuck stage is equipped with an electrode that can be set to the same potential as the probe tips. By making the chuck stage and probes equipotential, the voltage difference that would cause partial discharge is eliminated. This allows vacuum suction fixation to be used without increasing partial discharge risk, as there is no potential difference between the fixed device and the probing elements.

Inventive Principle:

Principle #12Equipotentiality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The apparatus effectively prevents partial discharge by increasing pressure in the measurement space and removing foreign substances from the semiconductor device and probes, ensuring reliable evaluation without malfunctions.

Implementation Method 1

an evaluator that evaluates the electrical characteristics of the to-be-measured object connected to the probe, with a pressure increased in the space through supplying the gas from the first gas supplying part

Methodology Applied

Scientific EffectPressure increase: Pressure Increase

Implementation Method 2

the evaluation apparatuses bring, for example, by vacuum suction, an installation surface of the to-be-measured object in contact with a placed surface of a chuck stage to fix the installation surface

Methodology Applied

Scientific EffectVacuum suction: Vacuum

Data Source

PatentUS10436833B2Evaluation apparatus and evaluation method

Publication Date: 2019.10.08 MITSUBISHI ELECTRIC CORP

AI summary

Provided is a technique capable of preventing occurrence of partial discharge. An evaluation apparatus includes a probe disposed on an undersurface of an upper component; a sidewall part disposed on the undersurface of the upper component and enclosing sides of the probe; and a first gas supplying part. The first gas supplying part is capable of supplying a gas to a to-be-measured object that is placed on a stage when the sidewall part comes in proximity to the stage, and to a space enclosed by the stage, the sidewall part, and the upper component when the sidewall part is in contact with the stage.