Probe Heater Temperature Control and Noise Reduction
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional inspection apparatuses face challenges in precise temperature control, noise wave generation, and connection failures during high-precision inspections, particularly when using probe cards with built-in heaters.
Innovation Solution
An inspection apparatus with a probe device having a built-in heater and an electric power supply system that includes an open/close switch for precise temperature control and noise wave reduction, along with a continuity-checking device to ensure accurate connections.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If a probe card with a built-in heater is used to heat the inspected object, then temperature control is improved and contact dislocation is corrected, but noise wave generation occurs and connection failures may happen
Solution Approach 1:
The patent divides the heating system into separate modules: the probe card contains the heater element while the power supply and control circuits are separated into the tester unit. This segmentation allows the heater to be isolated from noise-generating electrical components, reducing electromagnetic interference during inspection operations.
Solution Approach 2:
The patent introduces an intermediary connection system between the probe card and tester, including protective films and structured contact portions that mediate the electrical connection. This intermediary layer stabilizes the connection and reduces noise transmission while maintaining effective heating control.
2Adaptability or versatility
If the probe card is replaced when the size of the inspected object changes, then adaptability is improved, but connection failure occurs in the heater power supply cable
Solution Approach 1:
The patent implements preliminary connection verification through a connection verification unit that checks the heater power supply cable connections before probe card replacement or during operation. This preliminary action prevents connection failures by identifying and correcting connection issues before they affect inspection operations.
Solution Approach 2:
The patent designs the probe card with a structured contact portion that provides mechanical cushioning and alignment features. This beforehand cushioning protects the connection points during probe card installation and replacement, preventing connection failures even when working with different inspected object sizes.
3Measurement precision
If temperature is increased to perform high-precision inspection, then inspection accuracy is improved, but contact dislocation occurs due to temperature difference
Solution Approach 1:
The patent applies local quality by providing heating elements specifically at the contact portions of the probe card where temperature differences cause expansion. This localized heating compensates for thermal distortion at the critical contact interface, maintaining alignment stability while enabling high-temperature inspection operations.
Solution Approach 2:
The patent utilizes controlled thermal expansion by designing the probe card structure to accommodate and compensate for expansion at the contact portions during heating. The structured contact portion and protective film work together to maintain stable contact alignment despite temperature-induced dimensional changes.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables accurate temperature control, suppresses noise waves, and ensures reliable connections, thereby enhancing inspection accuracy and safety.
Implementation Method 1
a probe device having a contact for contacting with an electrode of an inspected object and having a built-in heater for correcting dislocation of the contact to the electrode caused by temperature difference
Data Source
AI summary
The inspection apparatus includes a probe having a contact for contacting an electrode of an inspected object and having a built-in heater for correcting dislocation of the contact to the electrode caused by temperature difference between the probe and the inspected object; a tester for testing the probe and supplying electric power to the heater; an electric power supply, provided on the tester, for supplying electric power to the heater; and a temperature control unit for controlling electric power to the heater of the probe through the electric power supply, wherein the electric power supply includes at least one open/close switch for switching power to the heater on and off. A connector has a male connector and a female connector on opposing ends. A continuity-checking device checks supply of electric power to the heater from the electric power supply.