Probe Support Hole Geometry for Stable Substrate Inspection Jigs
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Solution Overview
Problem
Existing substrate inspection devices face challenges in stabilizing the supporting state of probes due to complex configurations and increased manufacturing costs, with issues such as rattling and instability in probe support, particularly when the rear-tip portion of the probe is supported in an inclined state.
Innovation Solution
An inspection jig with a probe support hole formed in the electrode-side support member, featuring a restricting surface inclined at a predetermined angle to stabilize the rear tip of the probe, preventing movement perpendicular to the inclination direction, thus ensuring stable support and easy insertion/extraction without requiring a complex shifting mechanism.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the rear-tip portion of the probe is supported in an inclined state using complex configurations, then probe stability is improved, but device complexity and manufacturing costs increase
Solution Approach 1:
The support plate is designed with an asymmetric probe support hole that is inclined at a predetermined angle θ relative to the normal direction of the support plate. This asymmetric inclination allows the probe to be supported in a stable inclined state without requiring complex support mechanisms, thereby improving probe stability while maintaining structural simplicity
Solution Approach 2:
The probe support hole is designed with specific geometric parameters including an inclined angle θ and a predetermined diameter that is larger than the probe diameter. By optimizing these parameters, the probe can be stably supported in an inclined position, preventing rattling while avoiding the need for complex support structures
2Reliability
If the probe support hole is designed with an inclined support line, then probe rattling is prevented, but manufacturing precision requirements increase
Solution Approach 1:
The probe support hole is formed with a specific inclined angle θ and diameter parameters that balance stability requirements with manufacturing feasibility. The diameter is designed to be larger than the probe diameter to accommodate positioning tolerances, while the inclination angle is optimized to prevent rattling without requiring excessive manufacturing precision
3Ease of operation
If a complex shifting mechanism is added to enable easy probe insertion and extraction, then ease of operation is improved, but device complexity increases
Solution Approach 1:
The probe support function is extracted from complex mechanical support structures and implemented through the simple geometric design of the probe support hole in the support plate. The inclined hole geometry inherently provides both stable support and easy probe insertion/extraction without requiring additional shifting mechanisms
Solution Approach 2:
The inclined probe support hole design allows the probe to be easily inserted and extracted by simply pushing or pulling the probe along its axis. The geometry of the support hole itself provides the necessary guidance and support, making the system self-sufficient without requiring external shifting mechanisms
Data Source
AI summary
This inspection jig is provided with: an inspection-side support member having a counter plate (51) provided with a facing surface (F) disposed to face the substrate; and an electrode-side support member (6) having supporting plates (61-63) disposed to face an electrode plate (9) located on the side opposite to the facing surface (F) of the counter plate (51) A probe supporting hole (23), into and by which the rear end portion of the probe (Pr) is inserted and supported, is provided in the supporting plates (61-63), and the probe supporting hole (23) is provided with a restricting surface which is formed along a supporting line (V) inclined at a certain angle (θ) with respect to a reference line (Z), and which restricts the rear end portion of the probe (Pr) from moving in the direction perpendicular to the inclined direction of the supporting line (V).