Semiconductor Probe Member Boundary Surface Reduction

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Solution Overview

Problem

The durability of probe members used in semiconductor device inspections is compromised by the presence of multiple boundary surfaces, which can lead to separation during use and increase manufacturing complexity and costs.

Innovation Solution

A method of manufacturing a probe member with reduced boundary surfaces by forming a contact portion and a body portion using multiple layer molds and plating processes, aligning centers and varying diameters to create a concave or convex structure, resulting in a probe member with one or two boundary surfaces.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If multiple layer molds and plating processes are used to form contact portion and body portion, then manufacturing precision and durability are improved by reducing boundary surfaces, but device complexity and manufacturing time increase

Engineering Contradiction:
ImprovedurabilityVSAvoidmanufacturing process complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent merges the contact portion and body portion into a single integrated structure formed through multiple plating processes on a unified substrate. Instead of assembling separate components that would create multiple boundary surfaces, the invention combines them into one piece with minimized boundary surfaces, thereby improving durability while managing manufacturing complexity through process integration rather than component assembly.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The manufacturing process is segmented into distinct plating stages (first plating for contact portion, second plating for body portion) allowing precise control over each region's properties. This process segmentation enables the formation of different materials and structures in specific zones without requiring physical separation of components, thus reducing boundary surfaces while maintaining manufacturing precision.

Inventive Principle:
Principle #1Segmentation

2Adaptability or versatility

If multiple boundary surfaces are present in the probe member, then manufacturing flexibility and adaptability are improved, but durability deteriorates due to separation risk during use

Engineering Contradiction:
Improvemanufacturing flexibilityVSAvoiddurability
Core Design Contradiction:
Adaptability or versatilityVSReliability

Solution Approach 1:

The patent converts the potential harm of multiple boundary surfaces into a benefit by strategically minimizing and optimizing their number. Instead of eliminating all boundaries (which would reduce manufacturing flexibility), the invention reduces them to the essential minimum required for functional differentiation, thereby improving durability while preserving necessary manufacturing adaptability through controlled boundary placement.

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

Solution Approach 2:

Different regions of the probe member are given different local qualities through selective plating processes. The contact portion receives specific plating for electrical conductivity and contact properties, while the body portion receives different plating for structural properties. This local differentiation achieves manufacturing flexibility without requiring multiple boundary surfaces, as the functional zones are created within a continuous integrated structure.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The reduced number of boundary surfaces enhances durability, lowers the risk of separation, and simplifies the manufacturing process, thereby reducing costs and time.

Implementation Method 1

a second operation of forming a contact portion by plating an inner surface of the first layer mold and a surface of the groove with a first metal

Methodology Applied
Scientific EffectElectroplating: Electroplating

Implementation Method 2

a fourth operation of plating an internal space of the contact portion, the first layer mold, the second layer mold, and the third layer mold with a second metal to be filled with a boundary surface along a surface of the contact portion to form a body portion

Methodology Applied
Scientific EffectElectroplating: Electroplating

Data Source

PatentUS20240319228A1Probe member for inspection, and manufacturing method therefor
Publication Date: 2024.09.26 BAEK JUNG GYUN
  • US20240319228A1 patent drawing
  • US20240319228A1 patent drawing
  • US20240319228A1 patent drawing

AI summary

A probe member for inspection according to an exemplary embodiment includes: a contact portion formed of a first metal with a sharp point on one side to contact an object to be inspected and a body portion formed of a second metal on the other side of the contact portion, wherein the body portion includes a concave portion formed on a side and having a second diameter smaller than a first diameter of the contact portion, and the contact portion and the body portion are formed through a separate process to form a boundary surface therebetween.