Scanning Probe Microscope Multi-Probe Assembly

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Solution Overview

Problem

Scanning probe microscopes require complex recalibration and are limited in throughput due to the need for probe exchange when switching between analysis and modification tasks, as existing systems are optimized for specific applications and cannot easily switch between analyzing and modifying operations without leaving the nano-world.

Innovation Solution

A probe assembly with at least one analyzing probe and one modifying probe, utilizing a piezo actuator for quick and reproducible positioning changes, allowing for simultaneous scanning and modification without leaving the nano-world, with control members enabling binary state operation to minimize control effort and prevent uncontrolled contact.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If a single probe is used for both analysis and modification tasks, then device complexity is reduced, but the probe must be exchanged between tasks which increases loss of time and reduces productivity

Engineering Contradiction:
Improveprobe assembly structureVSAvoidprobe exchange time
Core Design Contradiction:
Device complexityVSLoss of time

Solution Approach 1:

The probe assembly is segmented into multiple independent probes (analyzing probe and modifying probe) that can be selectively positioned. Each probe is optimized for its specific function, and they operate independently rather than requiring exchange of a single multi-functional probe.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The probe assembly system achieves multi-functionality by incorporating multiple specialized probes that can be selectively activated. The system as a whole performs both analysis and modification functions without requiring probe exchange, as each probe remains in place but is selectively engaged.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Adaptability or versatility

If multiple specialized probes are used for different functions, then adaptability is improved, but device complexity increases due to probe exchange requirements

Engineering Contradiction:
Improveapplication-specific optimizationVSAvoidprobe exchange mechanism
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The probe assembly incorporates dynamic positioning capability where probes can be selectively moved between active and inactive positions. The motion element enables the modifying probe to be positioned close to the specimen surface only when needed, while the analyzing probe operates independently, allowing functional switching without physical probe exchange.

Inventive Principle:
Principle #15Dynamics

3Ease of operation

If the modifying probe is positioned close to the specimen surface continuously, then modification capability is improved, but the risk of uncontrolled contact and damage increases

Engineering Contradiction:
Improvemodification readinessVSAvoidspecimen damage risk
Core Design Contradiction:
Ease of operationVSObject-affected harmful factors

Solution Approach 1:

The motion element enables dynamic positioning of the modifying probe, allowing it to be placed close to the specimen surface only when modification is required. The probe can be quickly retracted to a safe distance when not in use, minimizing the risk of uncontrolled contact while maintaining readiness for modification tasks.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The control system monitors the position and operational state of the probes, enabling precise control of the modifying probe's proximity to the specimen. Feedback mechanisms ensure the probe approaches only when intended and maintains safe distances otherwise, preventing uncontrolled contact.

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables rapid and efficient switching between analysis and modification modes, reducing switching times to less than half a minute, allowing for flexible and precise operation within the nano-world without damaging the specimen, and optimizing probe functions for specific tasks.

Implementation Method 1

utilizing a piezo actuator for quick and reproducible positioning changes

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentUS8769709B2Apparatus and method for analyzing and modifying a specimen surface
Publication Date: 2014.07.01 CARL ZEISS SMT GMBH
  • US8769709B2 patent drawing
  • US8769709B2 patent drawing
  • US8769709B2 patent drawing

AI summary

The invention refers to a probe assembly for a scanning probe microscope which comprises at least one first probe-adapted for analyzing a specimen, at least one second probe adapted for modifying the specimen and at least one motion element associated with the probe assembly and adapted for scanning one of the probes being in a working position across a surface of the specimen so that the at least one first probe interacts with the specimen whereas the at least one second probe is in a neutral position in which it does not interact with the specimen and to bring the at least one second probe into a position so that the at least one second probe can modify a region of the specimen analyzed with the at least one first probe.