Probe Microscope Optical System for Simultaneous Imaging
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Solution Overview
Problem
Current scanning probe microscopy systems face limitations in simultaneously integrating high-resolution probe microscopy and optical microscopy, particularly in maintaining optimal condenser light parameters and stability, which restricts the ability to perform high-resolution measurements, especially in liquids and with upright optical microscopes.
Innovation Solution
The apparatus and method involve a probe microscope device with a specimen holder, displacement unit, and an optical system that projects and maintains condenser light parameters, allowing for simultaneous examination using probe microscopy and optical microscopy, with an optical system that extends or modifies the condenser light path to increase installation height and maintain essential light properties, and includes a measurement light beam path for detecting probe movements using the light pointer principle.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a laser beam is focussed onto the cantilever using the light pointer principle, then the detection of cantilever bending is optimized, but the installation height is restricted and the integration with optical microscopy is limited
Solution Approach 1:
The patent introduces a beam splitter and additional optical elements to redirect the measurement light beam path in a different spatial dimension, allowing the light to reach the cantilever from an angled path rather than requiring direct vertical access. This resolves the contradiction by maintaining precise cantilever detection while increasing the available installation height.
2Adaptability or versatility
If probe microscopy and optical microscopy are integrated in a single apparatus, then simultaneous examination capabilities are improved, but the complexity of the optical system and difficulty of maintaining light parameters increase
Solution Approach 1:
The patent designs the optical system with a beam splitter that serves multiple functions: it simultaneously directs measurement light to the cantilever for probe microscopy detection and allows condenser light to pass through for optical microscopy examination. This multi-functional design enables simultaneous operation of both microscopy techniques while managing system complexity through shared optical components.
Solution Approach 2:
The beam splitter acts as an intermediary optical element that mediates between the measurement light path and the condenser light path. It selectively directs different light beams to their respective destinations while maintaining the integrity of both optical paths, thereby enabling integrated microscopy without excessive complexity.
3Measurement precision
If the measurement light beam spot is made smaller than the cantilever width for optimal detection, then the precision of bending detection is improved, but the requirements for optical focusing and system alignment become more stringent
Solution Approach 1:
The patent applies local quality by creating a focused laser spot with specific intensity distribution that is smaller than the cantilever width only at the critical measurement region. The optical system is designed to concentrate light precisely where needed on the cantilever surface while allowing the rest of the optical path to have more relaxed tolerances, thereby improving measurement precision without proportionally increasing alignment difficulty.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances the capability for simultaneous high-resolution examination by maintaining critical light parameters and stability, enabling precise measurements in both probe microscopy and optical microscopy, including in liquids, while avoiding restrictions on installation height and improving image brightness, resolution, and contrast.
Implementation Method 1
an optical system which is arranged downstream of the condenser illumination and is configured to project condenser light, which is emitted by the condenser illumination in a condenser light path, into the region of the specimen holder
Implementation Method 2
the measurement light beam is reflected at the cantilever or at a component connected to the cantilever, at a certain angle relative to the direction of impingement
Implementation Method 3
The reflected light beam is then directed onto a photodiode, which has a receiver surface comprising at least two segments. A difference of the received light beam for the two segments indicates that the measurement light beam is removed from a central position
Data Source
AI summary
The invention relates to an apparatus and a method for examining a specimen by means of probe microscopy, in particular scanning probe microscopy. The apparatus comprises a probe microscope device which has a specimen holder for holding a specimen to be examined, a measurement probe and a displacement unit which is configured to displace the specimen holder and the measurement probe relative to one another for an examination of the specimen by means of probe microscopy, and comprises a condenser illumination and also an optical system which is arranged downstream of the condenser illumination and is configured to project condenser light, which is emitted by the condenser illumination in a condenser light path, into the region of the specimen holder for optical microscopy of the specimen to be examined, while at least partially maintaining condenser light parameters with which the condenser light is emitted by the condenser illumination.