Non-Contact Probe Mirror Layout for Stable Galvano Scanning

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Solution Overview

Problem

The large size and instability of the mirror and galvano motor in non-contact probes due to their cantilevered support and integrated mirror configuration lead to posture instability and increased motor size, affecting the accuracy of laser beam reflection and reception.

Innovation Solution

The mirrors are positioned at opposite ends of a motor shaft, with the irradiating mirror at one end and the light-receiving mirror at the other, reducing mirror weight and load torque, and stabilizing their posture, while using a compact rotary encoder for precise positioning.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of moving object

If a single large mirror is used to reflect both the laser beam and the reflected light, then the mirror surface area increases, but the galvano motor size increases and the mirror posture becomes unstable

Engineering Contradiction:
Improvemirror surface areaVSAvoidmirror posture stability
Core Design Contradiction:
Area of moving objectVSReliability

Solution Approach 1:

The patent divides the single large mirror into two separate mirrors: a first mirror for reflecting the laser beam from the irradiating part, and a second mirror for reflecting the reflected light from the workpiece. This segmentation reduces the surface area of each individual mirror, allowing for more stable mounting and smaller galvano motor while maintaining the overall optical path functionality.

Inventive Principle:
Principle #1Segmentation

2Device complexity

If mirrors are supported in a cantilever manner, then the structure becomes simpler, but the mirror posture becomes unstable

Engineering Contradiction:
Improvemirror support structureVSAvoidmirror posture stability
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The patent combines the support functions for both mirrors into a single common support structure that is integrated with the galvano motor. This merged support structure provides stable positioning for both the first and second mirrors while maintaining relative simplicity in the overall design, resolving the contradiction between structural simplicity and posture stability.

Inventive Principle:
Principle #5Merging (Combining)

3Power

If a large mirror is used to perform both reflection functions, then the optical path is maintained, but the galvano motor becomes large

Engineering Contradiction:
Improvegalvano motor powerVSAvoidgalvano motor volume
Core Design Contradiction:
PowerVSVolume of moving object

Solution Approach 1:

By segmenting the reflection functions into two separate mirrors, each with smaller surface areas, the total moment of inertia and weight that the galvano motor must control is reduced. This allows for the use of a smaller, more compact galvano motor while still maintaining the necessary optical path functionality for both laser beam irradiation and reflected light reception.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration allows for a smaller, more stable galvano motor, enhancing the accuracy of laser beam radiation and reflection, reducing errors in light reception, and facilitating precise profile measurement.

Implementation Method 1

a first mirror that reflects the laser beam from the irradiating part toward a workpiece

Methodology Applied
Scientific EffectReflection: Reflection

Implementation Method 2

a second mirror that reflects a reflected light from the workpiece

Methodology Applied
Scientific EffectReflection: Reflection

Data Source

PatentUS12546586B2Non-contact probe and profile measurement apparatus
Publication Date: 2026.02.10 MITUTOYO CORP
  • US12546586B2 patent drawing
  • US12546586B2 patent drawing
  • US12546586B2 patent drawing

AI summary

A non-contact probe includes an irradiating part that radiates a laser beam, an irradiating mirror that reflects the laser beam from the irradiating part toward a workpiece, a light-receiving mirror that reflects the reflected light from the workpiece, and a galvano motor capable of swinging both the irradiating mirror and the light-receiving mirror. The irradiating mirror is provided at one axial end of the motor shaft that extends on both ends of the galvano motor, and the light-receiving mirror is provided at the other axial end of the motor shaft.