Probe Needle Mark Testing via Segmented Imaging
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Solution Overview
Problem
Current test methods for needle marks on semiconductor electrodes lack the precision and reliability required for miniaturization, as they either require high-cost, high-capacity controllers for high magnification or suffer from low accuracy at low magnification, and the complexity of switching between optical systems compromises reliability.
Innovation Solution
A test device and method utilizing an imaging system with a binning function that performs a high-speed, low-precision test followed by a low-speed, high-precision retest, allowing for accurate determination of needle marks with reduced processing demands and costs, without the need for multiple optical systems.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If imaging is performed at high magnification to achieve high precision needle mark testing, then measurement precision is improved, but device complexity and cost increase due to requiring high-capacity controllers and complex optical systems
Solution Approach 1:
The patent segments the imaging process into two distinct stages: a first imaging process that captures a wide field of view to locate the electrode, and a second imaging process that captures a narrow field of view to precisely evaluate the needle mark. This segmentation allows the system to achieve high measurement precision in the second stage without requiring a complex optical system capable of high magnification throughout the entire process, thereby resolving the contradiction between precision and device complexity
Solution Approach 2:
The patent dynamically changes the field of view between two different magnification levels during the imaging process. The imaging device switches from a first field of view (wide, lower magnification) to a second field of view (narrow, higher magnification) based on the progress of the testing process. This dynamic adaptation allows the system to achieve high precision when needed without maintaining complex high-magnification optics throughout, resolving the contradiction between measurement precision and device complexity
2Measurement precision
If imaging is performed at high magnification to achieve high precision needle mark testing, then measurement precision is improved, but productivity decreases due to increased processing time
Solution Approach 1:
The patent segments the imaging process into two distinct stages: a first imaging process that captures a wide field of view to locate the electrode, and a second imaging process that captures a narrow field of view to precisely evaluate the needle mark. This segmentation allows the system to achieve high measurement precision in the second stage without requiring a complex optical system capable of high magnification throughout the entire process, thereby resolving the contradiction between precision and device complexity
Solution Approach 2:
The patent dynamically changes the field of view between two different magnification levels during the imaging process. The imaging device switches from a first field of view (wide, lower magnification) to a second field of view (narrow, higher magnification) based on the progress of the testing process. This dynamic adaptation allows the system to achieve high precision when needed without maintaining complex high-magnification optics throughout, resolving the contradiction between measurement precision and device complexity
3Device complexity
If a single magnification is used for imaging, then device complexity is reduced, but measurement precision is insufficient for miniaturization requirements
Solution Approach 1:
The patent segments the imaging process into two distinct stages: a first imaging process that captures a wide field of view to locate the electrode, and a second imaging process that captures a narrow field of view to precisely evaluate the needle mark. This segmentation allows the system to achieve high measurement precision in the second stage without requiring a complex optical system capable of high magnification throughout the entire process, thereby resolving the contradiction between precision and device complexity
Solution Approach 2:
The patent dynamically changes the field of view between two different magnification levels during the imaging process. The imaging device switches from a first field of view (wide, lower magnification) to a second field of view (narrow, higher magnification) based on the progress of the testing process. This dynamic adaptation allows the system to achieve high precision when needed without maintaining complex high-magnification optics throughout, resolving the contradiction between measurement precision and device complexity
4Measurement precision
If multiple optical systems with different magnifications are provided to achieve high precision testing, then measurement precision is improved, but reliability decreases due to additional switching mechanisms that may break down
Solution Approach 1:
The patent segments the imaging process into two distinct stages: a first imaging process that captures a wide field of view to locate the electrode, and a second imaging process that captures a narrow field of view to precisely evaluate the needle mark. This segmentation allows the system to achieve high measurement precision in the second stage without requiring a complex optical system capable of high magnification throughout the entire process, thereby resolving the contradiction between precision and device complexity
Solution Approach 2:
The patent dynamically changes the field of view between two different magnification levels during the imaging process. The imaging device switches from a first field of view (wide, lower magnification) to a second field of view (narrow, higher magnification) based on the progress of the testing process. This dynamic adaptation allows the system to achieve high precision when needed without maintaining complex high-magnification optics throughout, resolving the contradiction between measurement precision and device complexity
Data Source
AI summary
A test device for testing a needle mark generated in an electrode formed in a test object when a probe needle contacts the electrode includes an imaging part having a binning function, and a controller configured to control at least the imaging part. The controller is configured to perform a high-speed low-precision test process of imaging the electrode, after a contact operation by the probe needle, by the imaging part whose binning function is on, and determining a state of the needle mark of the electrode, based on an imaging result, and a low-speed high-precision test process of imaging the electrode again by the imaging part whose binning function is off, according to a determination result in the high-speed low-precision test process, and determining a state of the needle mark of the electrode imaged again, based on an imaging result.