Composite Probe Card Needles for Controlled Scrubbing Contact
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Solution Overview
Problem
Existing probe cards face challenges in controlling needle deformation and movement during semiconductor testing, leading to inaccurate inspections and potential electrical shorts due to undesired contact between needles.
Innovation Solution
A probe card design with needles composed of materials having asymmetric elastic moduli allows for controlled deformation and movement, including buckling and torsion, to manage scrubbing phenomena and improve contact precision.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a uniform material is used for the needle, then manufacturing is simple, but needle deformation and movement cannot be controlled
Solution Approach 1:
The needle is constructed with different materials having different elastic moduli at different locations along its length. The first portion has a first elastic modulus while the second portion has a second elastic modulus, creating local quality variations that enable controlled deformation and movement characteristics in specific regions of the needle.
Solution Approach 2:
The needle comprises multiple portions made of different materials with different elastic moduli. This composite structure allows the needle to exhibit specific deformation characteristics when subjected to forces during semiconductor device testing, enabling controlled scrubbing action while maintaining manufacturing feasibility.
2Ease of manufacture
If needle deformation is not controlled, then manufacturing is easier, but inspection accuracy decreases due to inaccurate contact
Solution Approach 1:
By varying the material properties at different portions of the needle, the deformation characteristics are locally optimized to ensure accurate contact with the semiconductor device under test, thereby improving inspection accuracy while maintaining overall manufacturing feasibility.
Solution Approach 2:
The elastic modulus parameter is changed along the length of the needle by using different materials in different portions. This parameter variation enables controlled deformation that improves contact precision and inspection accuracy during the testing process.
3Stability of the object's composition
If needles are made rigid, then structural stability is improved, but scrubbing phenomena cannot be controlled
Solution Approach 1:
Different portions of the needle have different elastic moduli, allowing the upper portion to provide structural stability while the lower portion enables controlled scrubbing movement. This local quality differentiation resolves the contradiction between rigidity and scrubbing control.
Solution Approach 2:
The composite needle structure combines materials with different elastic properties to achieve both structural stability and controllable scrubbing action. The varying elastic moduli along the needle length allow it to maintain stability while performing controlled cleaning movements.
4Ease of manufacture
If uniform elastic modulus is used throughout the needle, then manufacturing is simpler, but contact precision and inspection accuracy are reduced
Solution Approach 1:
The needle employs local quality variations with different materials having different elastic moduli at different positions. This enables precise control of contact characteristics and improves inspection accuracy while maintaining reasonable manufacturing simplicity through modular construction.
Solution Approach 2:
The composite needle design uses multiple materials with different elastic properties to achieve precise contact control and improved inspection accuracy. The varying elastic moduli allow for optimized contact precision while keeping the manufacturing process manageable.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances the accuracy of semiconductor inspections by controlling needle movement and contact positions, reducing electrical shorts and enabling more precise electrical signal detection.
Implementation Method 1
the needle includes a first member that extends vertically and includes a first material, and a second member horizontally connected to the first member, wherein the second member includes a second material different from the first material
Implementation Method 2
an elastic modulus of the first region on one side of a plane is different from an elastic modulus of the second region on another side of the plane
Data Source
AI summary
Provided is a probe card including a lower plate, an upper plate spaced apart from the lower plate, and a needle that extends vertically to penetrate the lower plate and the upper plate, wherein the needle includes a first member that extends vertically and includes a first material, and a second member horizontally connected to the first member, wherein the second member includes a second material different from the first material.