Probe Needle Tip Positioning Using Image Segmentation

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing testing devices face challenges in precisely determining the position of probe needle tips due to issues like abrasion and partial image capture, which affects accurate contact with test pads and subsequent electrical testing.

Innovation Solution

A testing device equipped with a photographing unit, segmenting unit, and position determining unit uses a trained segmentation model to recognize needle regions and tip regions from images, allowing precise determination of needle tip positions based on their positional relationship, enabling accurate adjustment for contact with test pads.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If a single image is used to capture needle tips, then the imaging process is simple, but the position determination precision deteriorates due to abrasion and partial image capture

Engineering Contradiction:
Improveimaging process complexityVSAvoidneedle tip position precision
Core Design Contradiction:
Device complexityVSMeasurement precision

Solution Approach 1:

The patent divides the needle tip image into multiple regions (needle body region, needle tip region, and background region) using image segmentation. This allows precise identification of the needle tip position even when the needle is abraded or only partially captured in the image, resolving the contradiction between simple imaging and precise measurement.

Inventive Principle:
Principle #1Segmentation

2Speed

If conventional image recognition is used, then the processing is fast, but the reliability deteriorates due to image recognition errors

Engineering Contradiction:
Improveposition determination speedVSAvoidposition determination reliability
Core Design Contradiction:
SpeedVSReliability

Solution Approach 1:

The patent introduces an intermediary processing step between image capture and position determination: image segmentation based on region classification. This intermediary step filters out background noise and accurately separates the needle tip from the background, improving reliability without significantly impacting processing speed.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Device complexity

If the needle tip position is not accurately determined, then the testing setup is simpler, but the electrical testing accuracy deteriorates due to poor contact with test pads

Engineering Contradiction:
Improvetesting setup complexityVSAvoidelectrical testing accuracy
Core Design Contradiction:
Device complexityVSMeasurement precision

Solution Approach 1:

The patent performs preliminary image segmentation and needle tip position determination before the actual electrical testing. This preliminary action ensures that the probe needle is correctly positioned to contact the test pad, thereby guaranteeing electrical testing accuracy without complicating the testing setup itself.

Inventive Principle:
Principle #10Preliminary action

Data Source

PatentUS20240019483A1Testing device and method, and non-transitory computer-readable recording medium
Publication Date: 2024.01.18 TOKYO ELECTRON LTD
  • US20240019483A1 patent drawing
  • US20240019483A1 patent drawing
  • US20240019483A1 patent drawing

AI summary

A testing device includes photographing, segmenting, position determining, and position adjusting units. The photographing unit is configured to photograph a needle tip of a probe needle provided in a probe card used for testing of a test object. The segmenting unit is configured to recognize a needle region and a needle tip region of a validation image photographed by the photographing unit, by inputting the validation image to a segmentation model that is trained as described in the specification. The position determining unit is configured to determine a position of the needle tip based on a positional relationship between the needle region and the needle tip region. The position adjusting unit is configured to adjust a relative position between the test object and the needle tip of the probe needle based on the position of the needle tip determined by the position determining unit.