Moisture-Assisted Probe Oxidation for Marking Hydrophobic Surfaces
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Solution Overview
Problem
Existing methods for forming markings on sample surfaces, such as semiconductor wafers, are limited by the difficulty in applying them across various analyzers and the inability to form clearly observable markings on super-hydrophobic or hydrophobic surfaces, which hinders precise identification of abnormalities.
Innovation Solution
Supplying moisture to the probe tip before contact with the sample surface allows for the formation of a thicker and more numerous local oxide films, enhancing the visibility and applicability of markings on hydrophobic or super-hydrophobic surfaces.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a metal probe is used for atomic force microscopy, then the probe can perform electrical measurements, but the probe surface becomes contaminated by adsorption of organic substances and oxidation, deteriorating measurement quality
Solution Approach 1:
The patent introduces a silicon oxide film as an intermediary protective layer between the metal probe surface and the environment. This film prevents direct contact between the metal and organic substances/oxygen, thereby preventing contamination and oxidation while allowing the probe to maintain its electrical measurement capabilities through the insulating oxide layer.
Solution Approach 2:
The silicon oxide film creates an inert protective environment around the metal probe surface, isolating it from reactive substances in the air. This effectively creates a localized inert atmosphere that prevents harmful chemical reactions (adsorption and oxidation) without requiring the entire system to be in an inert atmosphere.
2Manufacturing precision
If the probe surface is cleaned to remove contamination, then measurement quality improves, but the observation time is limited and requires frequent cleaning interruptions
Solution Approach 1:
The silicon oxide film is formed on the probe surface before use, providing pre-established protection against contamination. This preliminary protective action eliminates the need for frequent cleaning interruptions during observation, allowing continuous measurements to be performed without time loss.
3Manufacturing precision
If a non-conductive coating is applied to prevent contamination, then the probe surface is protected, but the probe can no longer perform electrical measurements
Solution Approach 1:
The patent applies the silicon oxide coating selectively only to specific regions of the probe where protection is needed, while leaving the tip and other critical measurement areas exposed. This local application maintains electrical conductivity where required while providing protection where contamination would be harmful.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method increases the number of markings formed and their thickness, making them more observable and accurate for identifying abnormalities, thus improving the precision and applicability of analysis across different analytical devices.
Implementation Method 1
the probe surface is contaminated by adsorption of organic substances and oxidation
Implementation Method 2
probe for electric-field-assisted oxidation
Implementation Method 3
probe for electric-field-assisted oxidation
Data Source
Figure 1~2
AI summary
Provided is a method of preparing a sample surface on which a marking is formed, wherein the marking is a local oxide film locally formed on the sample surface, the local oxide film is formed by applying voltage between a probe and the sample surface while a tip of the probe is in contact with the sample surface, and the probe is brought into contact with the sample surface after moisture supply.