Probe Polishing Trajectory Calculation for Test Device Customization

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing test devices require individual customization for each user based on specific polishing requirements, leading to increased manufacturing and setup costs, as well as limited flexibility in adjusting polishing settings.

Innovation Solution

An information processing device that includes a processor and memory to set a polishing area and operation pattern for probes, and calculates a relative trajectory between the polishing member and probes, allowing for user-specific settings to be standardized and easily adjusted.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If individual customization is performed for each user based on specific polishing requirements, then polishing precision and user-specific performance are improved, but device complexity and manufacturing costs increase

Engineering Contradiction:
Improvepolishing precisionVSAvoiddevice complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent implements dynamic configurability where polishing parameters (area, pattern, trajectory) can be adjusted and stored as multiple sets corresponding to different users or requirements. The system dynamically selects and applies the appropriate parameter set based on user input, allowing customization without physical device modification. This resolves the contradiction by enabling precision customization through software-based dynamic parameters rather than hardware customization.

Inventive Principle:
Principle #15Dynamics

2Manufacturing precision

If individual customization is performed for each user, then polishing performance is improved, but work hours and setup time increase

Engineering Contradiction:
Improvepolishing performanceVSAvoidwork hours
Core Design Contradiction:
Manufacturing precisionVSLoss of time

Solution Approach 1:

The patent pre-calculates and stores multiple sets of polishing parameters (area, pattern, trajectory) corresponding to different user requirements before actual polishing operations. When a user needs customization, they simply select from pre-prepared parameter sets rather than performing time-consuming setup procedures. This resolves the contradiction by performing the complex configuration work in advance, making subsequent customization instant and efficient.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent creates and stores copies of polishing parameter sets that can be reused across different polishing operations and users. Instead of recreating polishing configurations from scratch for each user, the system replicates and adapts pre-defined parameter sets, significantly reducing setup time while maintaining user-specific performance requirements.

Inventive Principle:
Principle #26Copying

3Adaptability or versatility

If flexible adjustment of polishing settings is enabled, then adaptability is improved, but device complexity increases

Engineering Contradiction:
ImproveflexibilityVSAvoiddevice complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent implements a universal parameter management system that handles multiple polishing configurations (area, pattern, trajectory) through a single integrated software framework. The system can store, retrieve, and apply different parameter sets for various users and polishing scenarios using the same hardware infrastructure, achieving high flexibility without proportionally increasing device complexity. The universal system accommodates diverse polishing requirements through software-based parameter variation rather than hardware multiplication.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Data Source

PatentUS20250085348A1Information processing device, display and input device, and program
Publication Date: 2025.03.13 TOKYO ELECTRON LTD
  • US20250085348A1 patent drawing
  • US20250085348A1 patent drawing
  • US20250085348A1 patent drawing

AI summary

With respect to an information processing device for setting polishing content of probes configured to contact devices under test, the information processing device includes a processor; and a memory storing program instructions that cause the processor to set a polishing area in a polishing member configured to polish the probes; set an operation pattern to be used during the polishing of the probes; and calculate a relative trajectory between the polishing member and the probes based on the set polishing area and the set operation pattern.