Probe Re-registration Using Stored Imaging Conditions
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Solution Overview
Problem
The existing methods for re-registering probes and wafers in semiconductor inspection processes are time-consuming, especially when probe cards are replaced or pre-treatment changes occur, requiring extensive re-registration procedures.
Innovation Solution
A method that automatically moves imaging units based on previously registered position data to re-capture images at both low and high magnifications, allowing for quick re-registration of objects by reusing previously registered photographing conditions and position data.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If traditional re-registration methods are used when probe cards are replaced or pre-treatment changes occur, then alignment accuracy can be maintained, but the re-registration time becomes excessively long
Solution Approach 1:
The system performs preliminary actions by storing reference image data and photographing conditions from initially registered probes before any changes occur. When probe cards are replaced or contamination occurs, these pre-stored reference data and conditions are reused to rapidly re-register new probes without repeating the entire registration process, thus maintaining alignment accuracy while significantly reducing re-registration time.
Solution Approach 2:
The system creates optical copies by capturing reference images of probe tips at multiple magnifications and storing them as template data. When re-registration is needed, these stored image copies are compared with new probe images to automatically determine alignment, eliminating the need for manual re-measurement and drastically reducing the time required while preserving measurement precision.
2Manufacturing precision
If comprehensive re-registration is performed to ensure accurate alignment when probe shapes change, then alignment precision is maintained, but productivity decreases due to extended processing time
Solution Approach 1:
Reference photographing conditions and image data are established in advance during initial probe registration. When probe cards are replaced or probe shapes change, these pre-established reference conditions serve as templates for rapid re-registration, allowing the system to maintain manufacturing precision while minimizing the time lost to re-registration activities, thereby preserving inspection throughput.
Solution Approach 2:
The system adapts to probe shape changes by dynamically adjusting photographing parameters such as magnification levels and imaging conditions based on the specific probe being registered. This allows comprehensive alignment precision for new probe types while avoiding unnecessary re-registration steps for unchanged probes, thus maintaining productivity.
3Measurement precision
If multiple magnification levels are used to capture detailed probe images for accurate registration, then measurement accuracy improves, but the complexity of the registration process increases
Solution Approach 1:
The registration process is segmented into distinct magnification levels (e.g., low magnification for overall probe card positioning, high magnification for precise probe tip alignment). Each magnification level serves a specific function in the registration hierarchy, allowing the system to achieve high measurement precision while managing process complexity through structured, modular registration steps that can be selectively applied.
Solution Approach 2:
Photographing conditions including multiple magnification levels are predetermined and stored as reference data during initial registration. When re-registering probes, the system automatically selects and applies these pre-configured magnification parameters based on the registration stage, reducing the complexity of manual parameter adjustment while maintaining measurement accuracy.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly reduces the time required for re-registration, enabling efficient alignment and inspection even when probe shapes change or contamination occurs, while ensuring accurate alignment and minimizing errors.
Implementation Method 1
a first CCD camera 7A, attached to the side of the mounting table 5, for capturing images of the probes 6A; a second CCD camera 7B for capturing images of the wafer W
Data Source
AI summary
A method for re-registering at least one set of image information of an object to be aligned to align the object by an imaging unit, the image information including photographing conditions and position data of the object which have been previously registered by capturing an image of the object with the imaging unit. The method includes automatically moving at least one of the object and the imaging unit based on the position data of the image information and re-capture the image of the object with the imaging unit by using the previously registered photographing conditions of the image information and re-registering the image information by using the re-captured image of the object.