Semiconductor Inspection Probe with Sloped Body for Strain Reduction
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing probes used in semiconductor inspection concentrate strain at the boundary between the needle tip and middle portions when in contact with inspection objects, leading to potential damage and inefficiency in the inspection process.
Innovation Solution
A probe with a bar-shaped design featuring inclined slope surfaces and outward bulging regions along its body portion, which reduces strain concentration by distributing force more evenly and providing reinforcement at potential strain points.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the probe has a needle-like shape with a plate-like flat middle portion, then the probe can be brought into contact with the inspection object for inspection, but strain concentrates on the boundary between the needle tip portion and the needle middle portion
Solution Approach 1:
The probe body transitions from uniform thickness to variable thickness, with the first end having greater thickness than the body portion. This creates localized reinforcement at the first end where it connects to the needle tip, providing enhanced strain resistance precisely where needed during contact operations
Solution Approach 2:
The first slope surface is designed with a curved transitional shape rather than a sharp angular boundary, creating a gradual transition from the thicker first end to the thinner body portion. This curved geometry distributes stress more evenly and prevents strain concentration at the boundary
2Ease of manufacture
If the probe body has uniform thickness, then the manufacturing process is simpler, but strain concentrates at the boundary when in contact with inspection objects
Solution Approach 1:
The probe design changes the thickness parameter along the axial direction, creating a gradient from thicker at the first end to thinner at the body portion. This parameter variation optimizes the balance between manufacturing feasibility and strain distribution, providing reinforcement where needed while maintaining overall structural integrity
Data Source
AI summary
A probe has a substantially bar shape, and includes a tip end, a base end, and a body portion that is located between the tip end and the base end and has a thickness in a thickness direction orthogonal to an axial direction of the substantially bar shape thinner than the tip end. The body portion includes a slope surface that is continuous with the tip end and is inclined with respect to the axial direction in a direction in which the thickness becomes gradually thinner with increasing distance from the tip end. A first region having a surface shape that bulges outward is provided in at least a part of the slope surface.