Scanning Probe Microscope Stage Separation Mechanism

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Solution Overview

Problem

Conventional scanning probe microscopes face challenges during sample replacement, where the measurement unit's optical system is prone to axis shifts due to operator interference or mechanical impacts, and the process is time-consuming and labor-intensive.

Innovation Solution

A surface analysis device design that includes a sample stage and a measurement unit with a drive mechanism allowing the sample stage to be displaced relative to the measurement unit, enabling separation and sliding movement in different directions to prevent interference and facilitate easy sample removal without requiring cantilever movement.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the measurement unit is moved to take out the sample, then the optical system remains stable, but the operator's hand may unintentionally touch the adjustment knob or impact the optical system causing axis shift

Engineering Contradiction:
Improveoptical axis stabilityVSAvoidsample replacement safety
Core Design Contradiction:
ReliabilityVSEase of operation

Solution Approach 1:

Instead of moving the measurement unit to remove the sample, the patent inverts the approach by moving only the sample stage while keeping the measurement unit stationary. This resolves the contradiction by eliminating the risk of operator interference with the optical system while maintaining optical axis stability.

Inventive Principle:
Principle #13The other way round (Inversion)

2Reliability

If the cantilever is moved in the measurement unit before sample replacement, then the measurement process is completed, but the process requires time and labor

Engineering Contradiction:
Improvemeasurement completenessVSAvoidsample replacement time
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The patent applies preliminary action by moving the sample stage to a retracted position before sample replacement, creating space for easy sample access without requiring cantilever movement. This eliminates unnecessary time-consuming steps while ensuring measurement readiness can be quickly re-established.

Inventive Principle:
Principle #10Preliminary action

3Ease of operation

If the sample stage is moved in the first direction for sample removal, then the measurement unit and sample stage separate, but interference may occur during movement

Engineering Contradiction:
Improvesample accessibilityVSAvoidmechanical interference
Core Design Contradiction:
Ease of operationVSObject-affected harmful factors

Solution Approach 1:

The patent uses dimensional change by implementing two-directional movement: first direction (vertical) for separation and second direction (horizontal) for interference-free transit. This multi-dimensional approach allows the sample stage to move away from the measurement unit without mechanical interference while maintaining easy sample accessibility.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Data Source

PatentUS11499989B2Surface analysis device
Publication Date: 2022.11.15 SHIMADZU CORP
  • US11499989B2 patent drawing
  • US11499989B2 patent drawing
  • US11499989B2 patent drawing

AI summary

A surface analysis device is provided with a sample stage for placing a sample thereon, a cantilever to be arranged to face the sample stage, and a cantilever drive unit for driving the cantilever. The drive mechanism is configured, when taking out the sample stage, to shift the sample stage relative to a measurement unit so that the measurement unit and the sample stage separate from each other in a first direction in which the cantilever and the sample stage face each other, and then slidably move the stage in a direction intersecting with the first direction.