Probe Station Drive Quiet Mode for Low-Current Measurement
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Solution Overview
Problem
Existing methods for measuring semiconductor components in probe stations are inefficient due to prolonged time required for contact establishment and potential interference from electromagnetic fields generated by electric drives, especially during low-current and low-voltage measurements.
Innovation Solution
Defining the quiet mode based on technical parameters to minimize drive activation time, allowing for rapid positioning and contact establishment, and switching off drives during measurements to reduce electromagnetic interference, enabling low-current measurements without costly shielding.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If electric drives are switched off after each movement step to minimize electromagnetic field interference, then measurement precision is improved, but measurement time increases due to engagement and disengagement time required
Solution Approach 1:
The electric drives are pre-positioned in a ready state before the measurement process begins, allowing them to be quickly activated and deactivated without prolonged engagement/disengagement cycles. This preliminary preparation reduces the time penalty associated with switching drives on and off while maintaining the electromagnetic field isolation needed for precise measurements
2Loss of time
If electric drives remain activated during measurement to avoid engagement/disengagement time, then measurement time is reduced, but electromagnetic field interference increases affecting measurement precision
Solution Approach 1:
The drives are pre-positioned in a ready state that allows rapid activation only when needed for positioning adjustments during measurement, rather than requiring full engagement/disengagement cycles. This reduces time loss while minimizing electromagnetic interference exposure
3Measurement precision
If costly shielding is implemented between drive and device under test to reduce electromagnetic interference, then measurement precision is improved, but device complexity and cost increase
Solution Approach 1:
The harmful electromagnetic field interference is eliminated by removing the electric drives from the measurement area entirely, placing them outside the region where they would generate interfering fields. This extraction approach achieves measurement precision without requiring additional shielding complexity
Solution Approach 2:
A non-conductive, non-magnetic positioning mechanism serves as an intermediary between the electric drives and the device under test, allowing the drives to remain positioned for rapid response while preventing electromagnetic field interference from reaching the measurement area
Data Source
AI summary
A method is disclosed for measurement of wafers and other semiconductor components in a probe station, which serves for examination and testing of electronic components. The device under test is held by a chuck and at least one electric probe by a probe support and the device under test and the probe are selectively positioned relative to each other by a positioning device with electric drives and the device under test is contacted. The drive of the positioning device remains in a state of readiness until establishment of contact and is switched off after establishment of contact and before measurement of the device under test.