Probe Support Deformation Sensing for Precise DUT Contact Control
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Solution Overview
Problem
Conventional probe systems face challenges in reliably establishing contact between probes and devices under test (DUTs) due to the limitations of optical microscopes in resolving contact and overdrive, especially with smaller DUTs and increased circuit densities.
Innovation Solution
The introduction of a probe support system with an elongate support body and deformation measurement structure that generates a deformation output to monitor and regulate the contact and overdrive between probes and DUTs, using a deformation measurement sensor to detect and control the relative orientation and force applied.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If optical microscopes are used to observe probe contact, then alignment and contact observation are facilitated, but resolution and depth-of-focus limitations prevent reliable contact monitoring for smaller DUTs with increased circuit density
Solution Approach 1:
The patent replaces optical measurement systems with a mechanical deformation measurement system. Instead of using optical microscopes to visually observe probe contact, the system uses a deformation measurement structure (such as a load cell or strain gauge) to mechanically detect and quantify the contact force and deformation between the probe and DUT. This substitution enables higher resolution monitoring beyond the optical limits.
Solution Approach 2:
The patent introduces a deformation measurement structure as an intermediary between the probe and the observation system. This intermediary converts the contact interaction into a measurable deformation signal, which can then be processed to determine contact status and overdrive conditions with precision exceeding optical microscope capabilities.
2Reliability
If probe contact force is increased to ensure reliable contact, then contact reliability improves, but risk of inadvertent contact and damage to smaller DUTs increases
Solution Approach 1:
The patent implements a feedback control system that continuously monitors the deformation output from the deformation measurement structure during probe approach and contact. The system uses this real-time feedback to detect contact events and overdrive conditions, automatically adjusting probe position or alerting the operator to prevent excessive contact forces that could damage the DUT.
Solution Approach 2:
The system performs preliminary monitoring of the deformation output during the probe approach phase, before full contact is established. By detecting early signs of contact through deformation changes, the system can preemptively adjust probe positioning or reduce contact force to prevent inadvertent contact and potential damage to the DUT.
3Measurement precision
If deformation measurement structure is added to monitor contact, then contact and overdrive monitoring precision improves, but device complexity increases
Solution Approach 1:
The patent merges the deformation measurement structure with the probe support assembly, combining the support function and measurement function into a single integrated component. The deformation measurement structure is incorporated into the probe support body, eliminating the need for separate, standalone measurement devices and reducing overall system complexity despite adding measurement capability.
Solution Approach 2:
The probe support assembly is designed to perform multiple functions simultaneously: mechanical support for the probe, deformation measurement, and potential feedback control. By making the probe support structure multi-functional, the patent avoids adding separate dedicated components for each function, thereby minimizing the increase in device complexity while achieving high measurement precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances the reliability of contact and overdrive control, ensuring consistent contact force and preventing damage from inadvertent contacts, thereby improving the testing accuracy and durability of probe systems.
Implementation Method 1
a deformation measurement structure configured to generate a deformation output indicative of deformation of the elongate support body
Data Source
AI summary
Probe supports, probe assemblies that include the probe supports, probe systems that include the probe assemblies, and related methods. The probe assemblies include the probe support, a probe support mounting structure, and a probe. The probe support may include an elongate support body that extends between a support mount and a probe mount. The probe support also may include a deformation measurement structure configured to generate a deformation output indicative of deformation of the elongate support body. The probe support mounting structure may be operatively attached to the support mount. The probe may be operatively attached to the probe mount. The probe systems include a chuck, a signal generation and analysis assembly, and the probe assembly. The methods control the operation of a probe system based, at least in part, on a deformation output.