Scanning Probe Microscopy Tilt Angle Control for Indented Features
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Solution Overview
Problem
Existing scanning probe microscopy methods are not suitable for scanning indented features like trenches, holes, or pits due to the risk of the tilted probe tip clashing with the sample surface, as they are designed for protruding high aspect ratio features.
Innovation Solution
The method involves measuring the orientation of the probe relative to a reference surface to reduce the tilt angle of the probe tip, allowing it to be inserted into indented features with a reduced or zero tilt angle, and maintaining this low tilt angle during scanning to avoid collisions and ensure accurate data collection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the probe tip is tilted at a high angle to scan protruding high aspect ratio features, then the probe can approach the feature from the side without clashing, but the probe tip will clash with the lip of indented features such as trenches, holes, wells or pits
Solution Approach 1:
The system dynamically adjusts the tilt angle of the probe tip based on the feature type being scanned. For protruding features, a higher tilt angle is used to approach from the side, while for indented features, the tilt angle is reduced to prevent collision with the lip. This dynamic adjustment allows the same probe system to handle both feature types effectively.
Solution Approach 2:
The tilt angle parameter of the probe tip is changed according to the specific scanning requirements. By modifying this geometric parameter, the system adapts to different feature geometries - using a larger tilt angle for protruding features and a smaller tilt angle for indented features, thereby avoiding collisions in both scenarios.
2Object-affected harmful factors
If the probe tip tilt angle is reduced to scan indented features, then collision with the sample surface is avoided, but the probe cannot effectively scan protruding high aspect ratio features
Solution Approach 1:
The system employs dynamic control of the probe tip tilt angle, switching between different angular positions depending on whether indented or protruding features are being scanned. This dynamic capability resolves the contradiction by allowing the probe to use a reduced tilt angle for safe insertion into indented features while maintaining the ability to use a higher tilt angle for protruding features.
Solution Approach 2:
The scanning probe system is designed with multi-functionality to handle both indented and protruding features using the same probe assembly. By incorporating adjustable tilt angle control, the system achieves universality - the probe can perform safe insertion into indented features with reduced tilt angle while also being capable of scanning protruding high aspect ratio features when the tilt angle is increased.
Data Source
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AI summary
A method of scanning a feature with a probe, the probe comprising a cantilever mount, a cantilever extending from the cantilever mount to a free end, and a probe tip carried by the free end of the cantilever. An orientation of the probe is measured relative to a reference surface to generate a probe orientation measurement. The reference surface defines a reference surface axis which is normal to the reference surface and the probe tip has a reference tilt angle relative to the reference surface axis. A shape of the cantilever is changed in accordance with the probe orientation measurement so that the probe tip moves relative to the cantilever mount and the reference tilt angle decreases from a first reference tilt angle to a second reference tilt angle. A sample surface is scanned with the probe, wherein the sample surface defines a sample surface axis which is normal to the sample surface and the probe tip has a scanning tilt angle relative to the sample surface axis. During the scanning of the sample surface the cantilever mount is moved so that the probe tip is inserted into a feature in the sample surface with the scanning tilt angle below the first reference tilt angle.