Conductive Probe Tip Localization Using Charged Particle Beam Feedback

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Solution Overview

Problem

Current charged particle beam imaging systems rely on manual operation for probe tip positioning, which is time-consuming and prone to errors, especially when distinguishing the probe tip from background features.

Innovation Solution

A method and system that utilize a charged particle beam to intersect with a conductive probe, measuring electrical responses to determine the probe's location in a reference frame, and correlating this with the charged particle beam's reference frame using a transformation matrix.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If manual operation is used for probe tip positioning, then the system is easier to operate, but the positioning time increases and accuracy decreases

Engineering Contradiction:

Improveease of operationVSAvoidpositioning time

Core Design Contradiction:

Ease of operationVSLoss of time

Solution Approach 1:

The system performs self-positioning by automatically detecting the probe tip location through electrical response measurements and using feedback control to navigate the probe to the target position, eliminating the need for manual operation while reducing positioning time

Inventive Principle:

Principle #25Self-service

2Ease of operation

If manual operation is used for probe tip positioning, then the system is easier to operate, but the positioning accuracy decreases

Engineering Contradiction:

Improveease of operationVSAvoidpositioning accuracy

Core Design Contradiction:

Ease of operationVSMeasurement precision

Solution Approach 1:

The system measures electrical responses (current, capacitance, or impedance) from the probe tip environment and uses this feedback information to automatically adjust and position the probe tip with high precision, achieving accurate positioning without manual intervention

Inventive Principle:

Principle #23Feedback

Solution Approach 2:

The patent replaces manual mechanical positioning with an automated electrical measurement and control system that uses electrical responses to determine probe tip location and guide positioning, substituting mechanical manual operation with electrical-field-based automation

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Device complexity

If visual inspection is used for probe tip identification, then the system is simpler, but the accuracy decreases and background features cause errors

Engineering Contradiction:

Improvesystem complexityVSAvoidprobe tip localization accuracy

Core Design Contradiction:

Device complexityVSMeasurement precision

Solution Approach 1:

The patent replaces visual inspection methods with electrical measurement techniques that detect probe tip location through electrical responses (current, capacitance, or impedance measurements), substituting optical visualization with electrical field-based detection to achieve higher accuracy independent of background visual features

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The system introduces electrical response measurements as an intermediary to indirectly determine probe tip location, using the electrical characteristics of the probe tip environment as a mediator to achieve accurate localization without direct visual inspection

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables automated and precise positioning of the probe tip within the charged particle beam imaging system, reducing manual intervention and improving the accuracy of probe tip localization independent of visual inspection.

Implementation Method 1

measuring an electrical response from the intersection of the charged particle beam with the conductive probe

Methodology Applied

Scientific EffectCharged particle beam interaction: Electron Beam

Data Source

PatentUS20250180600A1Probe tip x-y location identification using a charged particle beam

Publication Date: 2025.06.05 INNOVATUM INSTR INC

AI summary

An automated system for controlling a conductive probe of a nanoprober system in situ to a charged particle beam (CPB) imaging system can include a nanoprober comprising an actuator and a conductive probe; signal measurement circuitry electrically coupled to the conductive probe and to receive an electrical signal from the conductive probe; and a hardware processor to execute operations. The operations can include activating a CPB within a first reference frame, the first reference frame associated with the CPB; causing, by a computerized control system, the CPB and the conductive probe to intersect; measuring an electrical response from the intersection of the CPB with the conductive probe; and determining a location of the conductive probe in a second reference frame based on the electric response from the intersection of the CPB with the conductive probe, the second reference frame associated with the conductive probe.