Probe Tip Localization Using Charged Particle Beam Current Profiles
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Solution Overview
Problem
Current charged particle beam imaging systems rely on manual operation for probe tip positioning, which is time-consuming and labor-intensive, and struggle to accurately automate the location of probe tips within the imaging system, especially when features are indistinguishable from background objects.
Innovation Solution
A method and system that use non-visual techniques to determine the location of a conductive probe tip within a charged particle beam imaging system by measuring electrical responses to the intersection of a charged particle beam and the probe, creating current profiles, and correlating these with a transformation matrix to align the probe tip's coordinate system with the imaging system's reference frame, enabling automated probe control and precise tip positioning.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If manual operation is used for probe tip positioning, then the probe can be positioned with human judgment, but the process becomes time-consuming and labor-intensive
Solution Approach 1:
The system enables automated probe tip positioning by having the probe itself generate the detection signal through its interaction with the charged particle beam. The probe tip location is determined automatically by measuring electrical responses (current profiles) when the probe intersects with the beam, eliminating the need for manual visual inspection and positioning while maintaining high accuracy.
Solution Approach 2:
The patent replaces manual visual inspection and mechanical positioning with an automated electrical detection system. Instead of relying on optical microscopes and human operators to locate and position the probe tip, the system uses electrical response measurements from the probe-beam intersection to automatically determine probe tip location and control positioning.
2Measurement precision
If visual inspection is used to identify probe tip location, then the location can be determined, but it becomes difficult when features are indistinguishable from background objects
Solution Approach 1:
The patent extracts the probe tip location detection from the visual imaging process. Instead of relying on optical images where probe tips may be indistinguishable from background features, the system separates location determination by using electrical response measurements specifically from the probe-beam intersection, providing unambiguous identification independent of visual clutter.
Solution Approach 2:
The patent introduces an intermediary detection mechanism between the probe and the location determination process. Rather than directly observing the probe tip visually, the system uses the electrical response (current profile) generated when the charged particle beam intersects with the conductive probe as an intermediary signal that clearly indicates probe tip location regardless of visual background complexity.
3Productivity
If automated probe control is implemented, then productivity improves, but accurate automation of probe tip location becomes challenging
Solution Approach 1:
The system implements feedback by continuously measuring the electrical response (current profile) when the charged particle beam intersects with the conductive probe. This feedback signal is used by the control system to automatically adjust and refine probe tip positioning, ensuring high accuracy while maintaining automated operation and productivity.
Solution Approach 2:
The patent performs preliminary characterization of the probe by creating current profiles through systematic scanning. This preliminary action establishes the relationship between probe position and electrical response, enabling subsequent automated positioning operations to achieve high accuracy without requiring complex real-time adjustments.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Facilitates automated and precise control of probe tips in charged particle beam imaging systems, reducing manual intervention and improving throughput by accurately identifying probe tip locations without visual inspection, even in cluttered environments.
Implementation Method 1
measuring an electrical response from the intersection of the charged particle beam with the conductive probe
Implementation Method 2
measuring a net current absorbed by the conductive probe from the intersection of the charged particle beam and the conductive probe
Data Source
AI summary
An automated system for controlling a conductive probe of a nanoprober system in situ to a charged particle beam (CPB) imaging system can include a nanoprober comprising an actuator and a conductive probe; signal measurement circuitry electrically coupled to the conductive probe and to receive an electrical signal from the conductive probe; and a hardware processor to execute operations. The operations can include activating a CPB within a first reference frame, the first reference frame associated with the CPB; causing, by a computerized control system, the CPB and the conductive probe to intersect; measuring an electrical response from the intersection of the CPB with the conductive probe; and determining a location of the conductive probe in a second reference frame based on the electric response from the intersection of the CPB with the conductive probe, the second reference frame associated with the conductive probe.