Probe Tip Length Calibration Using Non-Contact Optical Detection
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Solution Overview
Problem
Existing probe systems face challenges in accurately determining the fiber length of optical fibers in probe assemblies, leading to potential damage during adjustment processes due to limited sensing ranges and the need for repeated adjustments, which can harm the probe positioner.
Innovation Solution
A tip length calibration device with a base, position adjusting mechanism, and target detection module is used to determine the fiber length without direct contact, utilizing a non-contact sensor and light emitter/receiver to ensure precise alignment within a sensing region.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a capacitive distance sensor with limited sensing range (500 μm to 900 μm) is used to determine fiber length, then the sensing range is constrained, but the fiber tip position cannot be accurately determined when outside this range, requiring repeated adjustments that increase the risk of collision damage
Solution Approach 1:
The patent transitions from direct contact measurement to non-contact optical measurement, adding a spatial dimension to the measurement process. The optical fiber tip is positioned within the sensing region without physically contacting the reference surface, allowing measurement beyond the limited capacitive sensor range while maintaining precision through optical detection methods
Solution Approach 2:
The patent introduces a target detection module with reference surface as an intermediary between the fiber tip and the measurement system. This intermediary enables indirect measurement of fiber length through optical interaction with the reference surface, eliminating the need for direct contact and expanding the effective sensing range beyond 500-900 μm
2Measurement precision
If the fiber tip is adjusted by bringing it into contact with a physical surface using a mirror and image capturing device, then the fiber length can be determined, but the fiber tip becomes prone to collision damage during adjustment
Solution Approach 1:
The patent replaces the mechanical contact-based adjustment system (mirror and image capturing device requiring physical contact) with a non-contact optical measurement system. The target detection module detects fiber tip position through optical fields without mechanical contact, eliminating the harmful collision damage while maintaining measurement precision
Solution Approach 2:
The patent applies preliminary anti-action by using the target detection module to detect and confirm fiber tip position within the sensing region before any physical contact occurs. This preventive measurement approach ensures accurate positioning is achieved through optical detection rather than trial-and-error contact adjustment, preventing collision damage before it can occur
3Manufacturing precision
If the probe assembly is repeatedly installed on the probe positioner for adjustment, then the fiber length can be calibrated, but the probe positioner is at risk of damage from external forces
Solution Approach 1:
The patent performs preliminary action by completing the fiber length calibration process in a single setup using the target detection module. The fiber tip position is determined through non-contact optical detection within the sensing region, eliminating the need for repeated installations and adjustments on the probe positioner, thereby preventing cumulative damage from external forces
Solution Approach 2:
The patent extracts the measurement function from the probe positioner system by implementing an independent target detection module with reference surface. This separation allows fiber length calibration to be performed without repeatedly mounting and dismounting the probe assembly on the probe positioner, reducing mechanical stress and improving reliability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device allows for accurate fiber length calibration, reducing the risk of damage to the probe positioner and saving time and effort in the calibration process, enabling the use of calibrated probe assemblies for testing unpackaged semiconductor devices.
Implementation Method 1
a capacitive distance sensor can be used in combination with the optical fiber to determine a separation distance between the DUT and the optical fiber
Implementation Method 2
The target detection module is disposed on the base and configured to determine whether a tip portion of the probe assembly is present in a sensing region next to the reference surface
Data Source
AI summary
A tip length calibration device, a probe system including the same, a tested semiconductor device, a method for producing the same, a method for tip length calibration, and a method for testing an unpackaged semiconductor device. The tip length calibration device includes a base, a position adjusting mechanism, and a target detection module. The position adjusting mechanism and the target detection module are disposed on the base. The position adjusting mechanism is configured to move the probe assembly to a sensing region, and the target detection module is configured to determine whether a tip portion of the probe assembly is present in the sensing region, such that a calibrated tip length can be acquired.