Prober Cleaning via Sealed Space Pressure Control
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing prober systems face challenges in cleaning probe cards without hindering the operation of the aligner in the Z-axis direction, as the space between the probe card and chuck top is often closed, leading to fluctuations in pressure that hinder the aligner's vertical movement, and using a bulged member increases costs and complexity.
Innovation Solution
A prober system with a sealed space between the probe card holder and chuck top, equipped with a pressure sensor and electro-pneumatic regulator, which controls internal pressure by performing intake or exhaust operations based on detected pressure changes, allowing for probe card cleaning without the need for a bulged member.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the space between the probe card and chuck top is closed to enable cleaning, then cleaning effectiveness is improved, but pressure fluctuations occur that hinder the aligner's vertical movement
Solution Approach 1:
The patent introduces a pressure control system with an electro-pneumatic regulator and pressure sensor to manage the internal pressure of the sealed space. The regulator performs intake or exhaust operations based on pressure sensor detection, maintaining stable pressure conditions that allow the aligner to move vertically without obstruction while preserving the sealed environment necessary for effective cleaning.
Solution Approach 2:
The system dynamically adjusts the pressure parameter within the sealed space by controlling the electro-pneumatic regulator. This parameter change enables the space to maintain sealing for effective cleaning while accommodating the vertical movement of the aligner through pressure equalization, resolving the contradiction between sealing and movement.
2Ease of operation
If a bulged member is used to maintain space during cleaning, then aligner operation is preserved, but device complexity and cost increase
Solution Approach 1:
The patent removes the need for a bulged member by extracting this component from the system. Instead, it uses a flat chuck top combined with a pressure control system to achieve the same functional outcome—maintaining space and enabling aligner operation without increasing structural complexity or cost.
Solution Approach 2:
The mechanical bulged member structure is replaced with a pneumatic control system. The electro-pneumatic regulator and pressure sensor system substitutes for the mechanical space-maintaining function of the bulged member, reducing structural complexity while preserving operational capability.
3Productivity
If the space is sealed for cleaning, then cleaning efficiency is improved, but pressure control becomes necessary to prevent movement issues
Solution Approach 1:
The patent implements a feedback control loop where the pressure sensor continuously monitors the internal pressure of the sealed space and provides information to the electro-pneumatic regulator. This feedback mechanism enables automatic pressure adjustment to maintain optimal conditions for cleaning while preventing pressure-related operational issues, balancing cleaning efficiency with system simplicity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables effective cleaning of probe cards without interfering with the aligner's operation in the Z-axis direction, maintaining efficiency and reducing costs by controlling internal pressure to prevent excessive collision or non-contact issues during the cleaning process.
Implementation Method 1
an electro-pneumatic regulator configured to control the internal pressure of the sealed space by performing an intake or exhaust operation with respect to the sealed space based on the internal pressure detected by the pressure sensor
Data Source
AI summary
There is provided a prober provided with a plurality of inspection chambers. Each inspection chambers includes: a probe card having a plurality of probes; a probe card holder configured to hold the probe card; a chuck top configured to place a cleaning wafer thereon; an aligner configured to drive the chuck top in a vertical direction when the probe card is cleaned using the cleaning wafer; a seal mechanism configured to allow a sealed space to be provided between the probe card holder and the chuck top; a pressure sensor configured to detect an internal pressure of the sealed space, which fluctuates with an operation of the chuck top driven by the aligner; and an electro-pneumatic regulator configured to control the internal pressure of the sealed space by performing an intake or exhaust operation with respect to the sealed space based on the internal pressure detected by the pressure sensor.