Semiconductor Prober Control for Concurrent Inspection Processing
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Solution Overview
Problem
Existing semiconductor inspection systems lack multifunctionality, with the prober often idling during inspection, leading to inefficient use of the controller and reduced operating rates.
Innovation Solution
A prober system with a controller that includes a processor to control the driver for precise positioning and inspection, allowing for simultaneous data processing and inspection target alignment, thereby enhancing the prober's functionality and increasing the operating rate of the processor.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the prober is used only for positioning the inspection target while a separate meter performs inspection, then the inspection function is maintained, but the prober idles during inspection causing reduced operating rate and inefficient use of the controller
Solution Approach 1:
The prober's controller is configured to perform both positioning control and inspection processing functions. The processor in the controller executes inspection routines, processes measurement results, and determines pass/fail judgments, allowing the prober to serve dual purposes during the inspection process rather than idling as in conventional separate-system architectures
Solution Approach 2:
The inspection processing functionality is merged into the prober's controller by providing the processor with measurement result processing capability. This integration combines the positioning control and inspection determination functions into a single control unit, enabling the prober to actively participate in the inspection process while maintaining system functionality
2Productivity
If the prober performs both positioning and inspection processing, then the operating efficiency increases, but the controller must handle additional processing loads
Solution Approach 1:
The controller is divided into functional modules: a measurement result processing unit that handles inspection data and determines pass/fail judgments, and a positioning control unit that manages probe and target alignment. This segmentation allows the processor to handle multiple tasks through modular processing routines, managing the increased functionality while maintaining organizational clarity
3Reliability
If the prober and meter operate as separate systems, then each device has dedicated functionality, but the overall system efficiency is reduced due to idle periods
Solution Approach 1:
The prober's processor continuously processes measurement results and determines inspection outcomes during the measurement period rather than idling. The controller maintains active engagement by executing inspection routines and analyzing data in real-time, eliminating the idle period that occurs in conventional separate-system operations where the prober waits for the meter to complete inspection
Data Source
AI summary
A prober includes a support configured to support an inspection target; a driver configured to move the support and adjust a posture of the support; and a controller including a memory and a processor coupled to the memory. The processor is configured to perform controlling the driver to position the inspection target at a predetermined position, and inspecting the inspection target in accordance with a measurement result of characteristics of the inspection target.