Prober Device Waveform Shaping for High-Speed Signal Analysis
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Solution Overview
Problem
Current prober devices face challenges in performing dynamic response analysis of high-speed signals for fine-structured devices like transistors, as they struggle with signal transmission loss and impedance fluctuations, limiting their ability to accurately evaluate transistors operating at megahertz and gigahertz levels.
Innovation Solution
The prober device shapes the input waveform of dynamic electric signals to achieve an output waveform that is approximately pulse-shaped, optimizing the transmission path to secure a sufficient frequency bandwidth and minimize signal deterioration, using mechanisms like equivalent circuit simulation to correct the output waveform.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a long input cable is used to transmit high-speed signals in a vacuum chamber, then the probe can operate in vacuum environment, but transmission loss and signal reflection increase due to meter-order cable length
Solution Approach 1:
A signal transmission line (coaxial cable) serves as an intermediary between the probe inside the vacuum chamber and the external signal generation/measurement equipment. The cable transmits high-speed signals while maintaining vacuum isolation, resolving the contradiction between vacuum operation capability and signal transmission quality.
2Adaptability or versatility
If high-frequency signals are transmitted through long cables, then dynamic response analysis can be performed, but impedance fluctuation causes signal reflection and loss
Solution Approach 1:
The system adjusts cable parameters (impedance matching, length optimization) and signal parameters (frequency, amplitude) to minimize transmission loss and reflection. By optimizing these parameters, the system achieves accurate dynamic response analysis despite using long cables for vacuum chamber connection.
3Ease of manufacture
If static electric characteristics are evaluated using DC voltage, then simple measurement can be performed, but defects in high-speed operating transistors cannot be detected
Solution Approach 1:
The system transitions from static DC voltage measurement to dynamic high-frequency signal measurement. By applying AC signals at operating frequencies (megahertz to gigahertz range), the system can detect defects in transistors that only manifest under dynamic operating conditions, while maintaining measurement capability through automated sweeping and analysis.
4Measurement precision
If the probe is brought into direct contact with the sample, then electric characteristics can be evaluated, but contact resistance and impedance fluctuation occur
Solution Approach 1:
The system replaces mechanical contact-based measurement with a combination of mechanical probe contact for signal injection and electrical field-based measurement for signal detection. This substitution reduces the impact of contact resistance and mechanical instability on measurement reliability.
Data Source
AI summary
The present invention relates to a prober device that shapes an input waveform of a dynamic electric signal to be input to one of probes, and observes an output waveform of the dynamic electric signal output through a sample, or preferably shapes the input waveform such that the output waveform of the dynamic electric signal output through the sample becomes approximately a pulse shape, when a response analysis of a dynamic signal is performed with respect to a fine-Structured device. With this, the response analysis of a high-speed dynamic signal equal to or greater than a megahertz level can be performed with respect to the fine-Structured device such as a minute transistor configuring an LSI.