Probing Device Socket DUT Positioning Signal Attenuation
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Solution Overview
Problem
As semiconductor memory speeds increase, signal attenuation or signal loss becomes a technical bottleneck for probing devices used to test the electrical characteristics of devices under test (DUTs), particularly due to the use of long cable lines which reduce testing efficiency and accuracy.
Innovation Solution
A probing device with a probe station featuring a platform having an opening and moving parts, allowing the DUT to be positioned directly under the test head, eliminating the need for long cable lines and enabling high-speed testing by positioning a socket and DUT on the test head, thereby reducing signal attenuation and loss.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If long cable lines are used to connect the DUT and the test head, then the DUT can be positioned away from the test head, but signal attenuation and signal loss increase
Solution Approach 1:
The patent extracts the DUT from the traditional configuration where it is connected via long cable lines to the test head. By removing the cable connection and positioning the DUT directly on the test head platform, the source of signal attenuation (the long cable) is eliminated, while the DUT remains accessible for testing through the probe station's manipulator and probe.
Solution Approach 2:
The patent merges the DUT positioning function with the test head platform. Instead of having separate locations for the DUT and test head connected by cables, the DUT is positioned directly on the test head platform, combining the support function into a single integrated structure that eliminates signal loss while maintaining operational capability.
2Ease of operation
If long cable lines are used to connect the DUT and the test head, then the DUT can be positioned away from the test head, but signal loss increases
Solution Approach 1:
The patent removes the long cable lines that connect the DUT to the test head, eliminating the source of signal loss and interference. The DUT is repositioned directly on the test head platform, maintaining operational flexibility while significantly improving testing accuracy by removing the unreliable cable connection medium.
3Loss of energy
If the DUT is positioned close to the test head, then signal loss is reduced, but the device complexity increases due to moving parts
Solution Approach 1:
The patent introduces dynamic elements including a movable platform on the test head that can move in the X and Y directions, and column members with moving parts that enable Z-direction movement. These dynamic components allow precise positioning of the DUT close to the probe station while maintaining the ability to adjust for different testing scenarios, accepting increased structural complexity to achieve minimal signal loss.
4Measurement precision
If the probe station is moved to position the DUT in the opening, then the DUT can be positioned precisely, but the device complexity increases
Solution Approach 1:
The patent employs a movable probe station with column members that have moving parts, enabling precise positioning of the DUT in the opening through controlled movement in multiple directions. This dynamic positioning system achieves high measurement precision by allowing the probe station to be moved to exact positions, accepting the inherent increase in structural complexity as necessary for achieving the required positioning accuracy.
Data Source
AI summary
A probing device includes a probe station having a platform with an opening; a manipulator on the platform and having a probe; a test head; and a socket disposed on the test head and configured to support a DUT. The test head has a moving part configured to allow the DUT to be moved with respect to the probe station.


